Recognition of semiconductor defect patterns using spatial filtering and spectral clustering

Expert Systems with Applications

Volumn 34, Issue 3, 2008, Pages 1914-1923

  Wang, Chih Hsuan ^a  

^a MING CHUAN UNIVERSITY   (Taiwan)

Author keywords

Data mining; Defect pattern; Fuzzy clustering; Spectral clustering

Indexed keywords

FUZZY CLUSTERING; PATTERN RECOGNITION; PROCESS ENGINEERING; QUALITY CONTROL; SEMICONDUCTOR DEVICE MANUFACTURE; WSI CIRCUITS;

DEFECT PATTERN; PROCESS ENGINEERS; SPECTRAL CLUSTERING; WAFER MAP;

CRYSTAL DEFECTS;

EID: 37449022393     PISSN: 09574174     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.eswa.2007.02.014     Document Type: Article

References (34)

1. Bach F.R., and Jordan M.I. Learning spectral clustering. Advances in neural information processing systems Vol. 16 (2004), MIT Press, Cambridge, MA
2. Bengio, Y., Vincent, P., & Paiement, J. F. (2003). Learning eigenfunctions of similarity: linking spectral clustering and kernel PCA. Technical Report, University de Montral.
3. Bensmail H., and Celeux G. Regularized Gaussian discriminant analysis through eigenvalue decomposition. Journal of the American Statistical Association 91 (1996) 1743-1748
4. Bezdek J.C. Pattern recognition with fuzzy function algorithms (1981), Plenum Press, New York
5. Chen F.L., and Liu S.F. A neural-network approach to recognize defect spatial pattern in semiconductor fabrication. IEEE Transactions on Semiconductor Manufacturing 13 (2000) 366-372
6. Chien C.F., Wang W.C., and Cheng J.C. Data mining for yield enhancement in semiconductor manufacturing and an empirical study. Expert Systems with Applications 33 1 (2007) 192-198
7. Chou P.B., Rao A.R., Sturenbecker M.C., Wu F.Y., and Brecher V.H. Automatic defect classification for semiconductor manufacturing. Machine Vision and Applications 9 (1997) 201-214
8. Cunningham J.A. The use and evaluation of yield models in integrated circuit manufacturing. IEEE Transactions on Semiconductor Manufacturing 3 (1990) 60-71
9. Cunningham S.P., and MacKinnon S. Statistical methods for visual defect metrology. IEEE Transactions on Semiconductor Manufacturing. 11 (1998) 48-53
10. Dave R.N., and Krishnapuram R. Robust clustering methods: a unified review. IEEE Transactions on Fuzzy Systems 5 2 (1997) 270-293
11. Ferris-Prabhu A.V. A cluster-modified Poisson model for estimating defect density and yield. IEEE Transactions on Semiconductor Manufacturing 3 (1990) 54-59
12. Friedman D.J., and Albin S.L. Clustered defects in IC fabrication: impact on process control charts. IEEE Transactions on Semiconductor Manufacturing 4 (1991) 36-42
13. Friedman D.J., Hansen M.H., Nair V.N., and James D.A. Model-free estimation of defect clustering in integrated circuit fabrication. IEEE Transactions on Semiconductor Manufacturing 10 3 (1997) 344-359
14. Girolami M. Mercer kernel based clustering in the feature space. IEEE Transactions on Neural Networks 13 3 (2002) 780-784
15. Gonalez R.C., and Woods R.E. Digital image processing. 2nd ed. (2001), Prentice-Hall
16. Gustafson, D. E., & Kessel, W.C. (1979). Fuzzy clustering with a fuzzy covariance matrix. In Proceedings of the IEEE-CDC, San Diego, pp. 761-766.
17. Hansen M.H., Friedman D.J., and Nair V.J. Monitoring wafer map data from integrated circuit fabrication process for spatially clustered defects. Technometrics 39 3 (1997) 241-253
18. Hsieh H.W., and Chen F.L. Recognition of spatial defect patterns in semiconductor fabrication. International Journal of Production Research 42 19 (2004) 4153-4172
19. Hsieh K.L., and Tong L.I. The application of control chart and defect clustering in IC manufacturing based on fuzzy theory. Expert Systems with Applications 32 3 (2007) 765-776
20. Hwang J.Y., and Kuo W. Model-based clustering for integrated circuit yield enhancement. European Journal of Operational Research 178 1 (2007) 143-153
21. Ichihashi, H., Honda, K., & Tani, N. (2000). Gaussian mixture PDF approximation and fuzzy c-means clustering with entropy regularization. In Proceedings of the 4th Asian fuzzy system symposium, Tsukuba, Japan, pp. 212-221.
22. Jain A.K., Murty M.N., and Flynn P.J. Data clustering: a review. ACM Computing Survey 3 3 (1999) 264-323
23. Kim D.W., Lee K.Y., Lee D., and Lee K.H. Evaluation of the performance of clustering algorithms in kernel-induced feature space. Pattern Recognition 38 (2005) 607-611
24. Lee J.H., Yu S.J., and Park S.C. Design of intelligent data sampling methodology based on data mining. IEEE Transactions on Robotics and Automation 5 17 (2001) 637-649
25. Lee J.H., Yu S.J., and Park S.C. A new intelligent SOFM-based sampling plan for advanced process control. Expert Systems with Applications 20 (2001) 133-151
26. Liu S.F., Chen F.L., and Lu W.B. Wafer bin map recognition using a neural network approach. International Journal of Production Research 40 (2002) 2207-2223
27. Miyamoto, S., & Mukaidono, M., (1997). Fuzzy c-means as a regularization and maximization entropy approach. In Proceedings of the 7th international fuzzy systems association world congress, Prague, Czech, pp. 86-92.
28. Mizutani K., and Miyamoto S. Possibilistic approach to kernel-based fuzzy c-means clustering with entropy regularization. Lecture Notes in Computer Science 3558 (2005) 144-155
29. Ng A.Y., Jordan M.I., and Weiss Y. On spectral clustering: analysis and an algorithm. Advances in neural information processing systems Vol. 14 (2002), MIT Press, Cambridge, MA
30. Raghavachari M., Srinivasan A., and Sullo P. Poisson mixture yield models for integrated circuits: a critical review. Microelectronics Reliability 37 (1997) 565-580
31. Raykar, V. C. (2004). Spectral clustering and kernel principal component analysis are pursuing good projections. Technical Report, University of Maryland, College Park.
32. Su C.T., Yang T., and Ke C.M. A neural-network for semiconductor wafer post-sawing inspection. IEEE Transactions on Semiconductor Manufacturing 15 (2002) 260-266
33. Wang C.H., Kuo W., and Bensmail H. Detection and classification of defect patterns on semiconductor wafers. IIE Transactions 38 (2006) 1059-1068
34. Xu R., and Wunsch D. Survey of clustering algorithms. IEEE Transactions on Neural Networks 16 3 (2005) 645-678