Detection of pinhole defects on chips and wafers using DCT enhancement in computer vision systems

International Journal of Advanced Manufacturing Technology

Volumn 34, Issue 5-6, 2007, Pages 567-583

  Lin, Hong Dar ^a   Ho, Duan Cheng ^a  

^a CHAOYANG UNIVERSITY OF TECHNOLOGY   (Taiwan)

Author keywords

Computer vision system; Cumulative sum algorithm; Discrete cosine transform; Enhancement of frequency domain; Pinhole defect detection

Indexed keywords

DEFECTS; DISCRETE COSINE TRANSFORMS; FEATURE EXTRACTION; FREQUENCY DOMAIN ANALYSIS; MICROPROCESSOR CHIPS; SILICON WAFERS;

COMPUTER VISION SYSTEM; CUMULATIVE SUM ALGORITHMS; PINHOLE DEFECT DETECTION; SURFACE BARRIER LAYER;

COMPUTER VISION;

EID: 34548249604     PISSN: 02683768     EISSN: 14333015     Source Type: Journal    
DOI: 10.1007/s00170-006-0614-3     Document Type: Article

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