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International Journal of Advanced Manufacturing Technology

Volumn 65, Issue 1-4, 2013, Pages 43-56

A hybrid defect detection for in-tray semiconductor chip

(3) Chen, Chin Sheng a Huang, Chien Liang a Yeh, Chun Wei b

a NATIONAL TAIPEI UNIVERSITY OF TECHNOLOGY (Taiwan)

b UNIVERSITY OF BIRMINGHAM (United Kingdom)

Author keywords

Adaptive image difference method; Design rule strategy; Hybrid approach of defect detection; Image alignment; Semiconductor chip

Indexed keywords

ADAPTIVE IMAGES; DEFECT DETECTION; DESIGN-RULE STRATEGY; IMAGE ALIGNMENT; SEMICONDUCTOR CHIPS;

ALIGNMENT; DEFECTS; INSPECTION; TEMPLATE MATCHING;

SURFACE DEFECTS;

EID: 84874304186 PISSN: 02683768 EISSN: 14333015 Source Type: Journal
DOI: 10.1007/s00170-012-4149-5 Document Type: Article

Times cited : (10)

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* 이 정보는 Elsevier사의 SCOPUS DB에서 KISTI가 분석하여 추출한 것입니다.