SCOPUS 정보 검색 플랫폼

Journal of Physics and Chemistry of Solids

Volumn 73, Issue 2, 2012, Pages 308-316

Investigation of properties of Cu containing DLC films produced by PECVD process

(7) Dwivedi, Neeraj a,b Kumar, Sushil a Malik, Hitendra K b Sreekumar, C a Dayal, Saurabh a Rauthan, C M S a Panwar, O S a

a NATIONAL PHYSICAL LABORATORY (India)

b INDIAN INSTITUTE OF TECHNOLOGY DELHI (India)

Author keywords

A. Thin films; B. Plasma deposition; C. Infrared spectroscopy; D. Electrical properties; D. Mechanical properties

Indexed keywords

BASE PRESSURE; BONDING STATE; COMPRESSIVE RESIDUAL STRESS; DIAMOND LIKE CARBON; DLC FILM; ELECTRICAL PROPERTY; FT-IR SPECTRUM; FTIR; GAS PRESSURES; HYDROGEN CONTENTS; INDENTATION LOAD; NANOMECHANICAL PROPERTY; RAMAN ANALYSIS; RF-PECVD; VARIOUS SUBSTRATES; X-RAY DIFFRACTION TECHNIQUES;

ATOMIC FORCE MICROSCOPY; ATOMIC SPECTROSCOPY; CARBON; CARBON FILMS; CHEMICAL VAPOR DEPOSITION; DEPOSITION; DIAMOND LIKE CARBON FILMS; ELECTRIC PROPERTIES; HYBRID SYSTEMS; HYDROGEN; INFRARED SPECTROSCOPY; MECHANICAL PROPERTIES; PLASMA DEPOSITION; PLASMA ENHANCED CHEMICAL VAPOR DEPOSITION; RAMAN SPECTROSCOPY; RESIDUAL STRESSES; SCANNING ELECTRON MICROSCOPY; STRUCTURAL PROPERTIES; THIN FILMS; X RAY DIFFRACTION; X RAY PHOTOELECTRON SPECTROSCOPY;

COPPER;

EID: 84904785230 PISSN: 00223697 EISSN: None Source Type: Journal
DOI: 10.1016/j.jpcs.2011.10.019 Document Type: Article

Times cited : (72)

References (60)

1
- 0000800377
- J. Robertson Phys. Rev. Lett. 68 1992 220
- (1992) Phys. Rev. Lett. , vol.68 , pp. 220
- Robertson, J.¹

2
- 79551681611
- N. Dwivedi, S. Kumar, C.M.S. Rauthan, and O.S. Panwar Appl. Phys. A 102 2011 225
- (2011) Appl. Phys. A , vol.102 , pp. 225
- Dwivedi, N.¹ Kumar, S.² Rauthan, C.M.S.³ Panwar, O.S.⁴

3
- 42549094095
- J.X. Liao, E.Q. Li, Z. Tian, X.F. Pan, J. Xu, L. Jin, and H.G. Yang J. Phys. D. Appl. Phys. 41 2008 055305
- (2008) J. Phys. D. Appl. Phys. , vol.41 , pp. 055305
- Liao, J.X.¹ Li, E.Q.² Tian, Z.³ Pan, X.F.⁴ Xu, J.⁵ Jin, L.⁶ Yang, H.G.⁷

4
- 7544234212
- T. Ohana, M. Suzuki, T. Nakamura, A. Tanaka, and Y. Koga Diamond Relat. Mater. 13 2004 2211
- (2004) Diamond Relat. Mater. , vol.13 , pp. 2211
- Ohana, T.¹ Suzuki, M.² Nakamura, T.³ Tanaka, A.⁴ Koga, Y.⁵

5
- 17644389177
- S. Bhattacharyya, and S.R.P. Silva Thin Solid Films 482 2005 94
- (2005) Thin Solid Films , vol.482 , pp. 94
- Bhattacharyya, S.¹ Silva, S.R.P.²

6
- 0031269713
- L. Huang, Y. Hung, and S. Chang IEEE Trans. Magn. 33 1997 4551
- (1997) IEEE Trans. Magn. , vol.33 , pp. 4551
- Huang, L.¹ Hung, Y.² Chang, S.³

7
- 0036643403
- B. Gupta, P.K. Shishodia, A. Kapoor, R.M. Mehra, T. Soga, T. Jimbo, and M. Umeno Sol. Energy Mater. Sol. Cells 73 2002 261
- (2002) Sol. Energy Mater. Sol. Cells , vol.73 , pp. 261
- Gupta, B.¹ Shishodia, P.K.² Kapoor, A.³ Mehra, R.M.⁴ Soga, T.⁵ Jimbo, T.⁶ Umeno, M.⁷

8
- 76849115552
- S. Kumar, N. Dwivedi, C.M.S. Rauthan, and O.S. Panwar Vacuum 84 2010 882
- (2010) Vacuum , vol.84 , pp. 882
- Kumar, S.¹ Dwivedi, N.² Rauthan, C.M.S.³ Panwar, O.S.⁴

9
- 79951651486
- N. Dwivedi, S. Kumar, C.M.S. Rauthan, and O.S. Panwar Plasma Process. Polym. 8 2011 100
- (2011) Plasma Process. Polym. , vol.8 , pp. 100
- Dwivedi, N.¹ Kumar, S.² Rauthan, C.M.S.³ Panwar, O.S.⁴

10
- 0242664907
- C. Godet, S. Kumar, and V. Chu Philos. Mag. B 83 2003 3351
- (2003) Philos. Mag. B , vol.83 , pp. 3351
- Godet, C.¹ Kumar, S.² Chu, V.³

11
- 0000430923
- K.M. Krishna, M. Umeno, Y. Nukaya, T. Soga, and T. Jimbo Appl. Phys. Lett. 77 2000 1472
- (2000) Appl. Phys. Lett. , vol.77 , pp. 1472
- Krishna, K.M.¹ Umeno, M.² Nukaya, Y.³ Soga, T.⁴ Jimbo, T.⁵

12
- 0000879286
- P.J. Fallon, V.S. Veerasamy, C.A. Davis, J. Robertson, G.A.J. Amaratunga, W.I. Milne, and J. Koskinen Phys. Rev. B 48 1993 4777
- (1993) Phys. Rev. B , vol.48 , pp. 4777
- Fallon, P.J.¹ Veerasamy, V.S.² Davis, C.A.³ Robertson, J.⁴ Amaratunga, G.A.J.⁵ Milne, W.I.⁶ Koskinen, J.⁷

13
- 0010005593
- D.R. Mckenzie, D. Muller, and B.A. Pailthorpe Phys. Rev. Lett. 67 1991 773
- (1991) Phys. Rev. Lett. , vol.67 , pp. 773
- McKenzie, D.R.¹ Muller, D.² Pailthorpe, B.A.³

14
- 34249028221
- S.E. Ong, S. Zhang, H. Du, and D. Sun Diamond Relat. Mater. 16 2007 1628
- (2007) Diamond Relat. Mater. , vol.16 , pp. 1628
- Ong, S.E.¹ Zhang, S.² Du, H.³ Sun, D.⁴

15
- 2442616923
- A. Champi, F.C. Marques, and F.L. Freire Diamond Relat. Mater. 13 2004 1538
- (2004) Diamond Relat. Mater. , vol.13 , pp. 1538
- Champi, A.¹ Marques, F.C.² Freire, F.L.³

16
- 0036605287
- F.L. Freire Jr. J. Non-Cryst. Solids 304 2002 251
- (2002) J. Non-Cryst. Solids , vol.304 , pp. 251
- Freire Jr., F.L.¹

17
- 4544377153
- J.F. Lin, Z.C. Wan, P.J. Wei, H.Y. Chu, and C.F. Ai Thin Solid Films 466 2004 137
- (2004) Thin Solid Films , vol.466 , pp. 137
- Lin, J.F.¹ Wan, Z.C.² Wei, P.J.³ Chu, H.Y.⁴ Ai, C.F.⁵

18
- 36049018955
- H.W. Choi, J.H. Choi, K.R. Lee, J.P. Ahn, and K.H. Oh Thin Solid Films 516 2007 248
- (2007) Thin Solid Films , vol.516 , pp. 248
- Choi, H.W.¹ Choi, J.H.² Lee, K.R.³ Ahn, J.P.⁴ Oh, K.H.⁵

19
- 0032629103
- A. Grill IBM J. Res. Develop. 43 1999 147
- (1999) IBM J. Res. Develop. , vol.43 , pp. 147
- Grill, A.¹

20
- 4944245607
- Y. Pauleau, F. Thiery, P.B. Barna, F. Misjak, A. Kovacs, S.N. Dub, V.V. Uglov, and A.K. Kuleshov Rev. Adv. Mater. Sci. 6 2004 140
- (2004) Rev. Adv. Mater. Sci. , vol.6 , pp. 140
- Pauleau, Y.¹ Thiery, F.² Barna, P.B.³ Misjak, F.⁴ Kovacs, A.⁵ Dub, S.N.⁶ Uglov, V.V.⁷ Kuleshov, A.K.⁸

21
- 0037439672
- I. Gerhards, C. Ronning, H. Hofsaas, M. Seibt, and H. Gibhardt J. Appl. Phys. 93 2003 1203
- (2003) J. Appl. Phys. , vol.93 , pp. 1203
- Gerhards, I.¹ Ronning, C.² Hofsaas, H.³ Seibt, M.⁴ Gibhardt, H.⁵

22
- 14944369653
- I. Gerhards, H. Stillrich, C. Ronning, H. Hofsaas, and M. Seibt Phys. Rev. B 70 2004 245418
- (2004) Phys. Rev. B , vol.70 , pp. 245418
- Gerhards, I.¹ Stillrich, H.² Ronning, C.³ Hofsaas, H.⁴ Seibt, M.⁵

23
- 77950938390
- A.P. Mousinho, R.D. Mansano, and M.C. Salvadori J. Alloys Compd. 495 2010 620
- (2010) J. Alloys Compd. , vol.495 , pp. 620
- Mousinho, A.P.¹ Mansano, R.D.² Salvadori, M.C.³

24
- 84904785720
- Perkin-Elmer Corp.
- C.D. Wagnar, W.M. Wiggs, L.E. Davis, J.F. Moulder, G.E. Muilenberg, Perkin-Elmer Corp., 1979.
- (1979)
- Wagnar, C.D.¹ Wiggs, W.M.² Davis, L.E.³ Moulder, J.F.⁴ Muilenberg, G.E.⁵

25
- 52049083427
- L. Ji, H. Li, F. Zhao, J. Chen, and H. Zhou Diamond Relat. Mater. 17 2008 1949
- (2008) Diamond Relat. Mater. , vol.17 , pp. 1949
- Ji, L.¹ Li, H.² Zhao, F.³ Chen, J.⁴ Zhou, H.⁵

26
- 78649334705
- N. Dwivedi, S. Kumar, Ishpal, S. Dayal, Govind, C.M.S. Rauthan, and O.S. Panwar J. Alloys Compd. 509 2011 1285
- (2011) J. Alloys Compd. , vol.509 , pp. 1285
- Dwivedi, N.¹ Kumar, S.² Ishpal³ Dayal, S.⁴ Govind⁵ Rauthan, C.M.S.⁶ Panwar, O.S.⁷

27
- 0030290754
- S. Paulston, P.M. Parlett, P. Stone, and M. Bowker Surf. Interface Anal. 24 1996 811
- (1996) Surf. Interface Anal. , vol.24 , pp. 811
- Paulston, S.¹ Parlett, P.M.² Stone, P.³ Bowker, M.⁴

28
- 5044222048
- S.H. Jeong, D.C. Kim, H.G. Jee, O.M. Moon, C.K. Jung, J.S. Moon, S.K. Kim, S.B. Lee, and J.H. Boo J. Vac. Sci. Technol. B 22 2004 2216
- (2004) J. Vac. Sci. Technol. B , vol.22 , pp. 2216
- Jeong, S.H.¹ Kim, D.C.² Jee, H.G.³ Moon, O.M.⁴ Jung, C.K.⁵ Moon, J.S.⁶ Kim, S.K.⁷ Lee, S.B.⁸ Boo, J.H.⁹

29
- 0003427458
- second edition Addison-Wesley Publishing Company Inc.
- B.D. Cullity Element of X-ray Diffraction second edition 1978 Addison-Wesley Publishing Company Inc.
- (1978) Element of X-ray Diffraction
- Cullity, B.D.¹

30
- 34548314234
- Z. Jiang, Q. Niu, W. Deng, Nanoscience 12 (2007) 40.
- (2007) Nanoscience , vol.12 , pp. 40
- Jiang, Z.¹ Niu, Q.² Deng, W.³

31
- 33845597948
- S. Hussain, and A.K. Pal Bull. Mater. Sci. 29 2006 553
- (2006) Bull. Mater. Sci. , vol.29 , pp. 553
- Hussain, S.¹ Pal, A.K.²

32
- 33846036454
- J.T. Titantah, D. Lamoen, E. Neyts, and A. Bogaerts J. Phys. Condens. Matter 18 2006 10803
- (2006) J. Phys. Condens. Matter , vol.18 , pp. 10803
- Titantah, J.T.¹ Lamoen, D.² Neyts, E.³ Bogaerts, A.⁴

33
- 75649127268
- S.V. Singh, T. Zaharia, M. Creatore, R. Groenen, K.V. Hege, and M.C.M. Van De Sanden J. Appl. Phys. 107 2010 13305
- (2010) J. Appl. Phys. , vol.107 , pp. 13305
- Singh, S.V.¹ Zaharia, T.² Creatore, M.³ Groenen, R.⁴ Hege, K.V.⁵ Van De Sanden, M.C.M.⁶

34
- 21544442978
- W. Jacob, and W. Moller Appl. Phys. Lett. 63 1993 1771
- (1993) Appl. Phys. Lett. , vol.63 , pp. 1771
- Jacob, W.¹ Moller, W.²

35
- 0020829528
- B. Dischler, A. Bubenzer, and P. Koidl Solid State Commun. 48 1983 105
- (1983) Solid State Commun. , vol.48 , pp. 105
- Dischler, B.¹ Bubenzer, A.² Koidl, P.³

36
- 42549091090
- R. Paul, S.N. Das, S. Dalui, R.N. Gayen, R.K. Roy, R. Bhar, and A.K. Pal J. Phys. D Appl. Phys. 41 2008 55309
- (2008) J. Phys. D Appl. Phys. , vol.41 , pp. 55309
- Paul, R.¹ Das, S.N.² Dalui, S.³ Gayen, R.N.⁴ Roy, R.K.⁵ Bhar, R.⁶ Pal, A.K.⁷

37
- 4544345027
- X.B. Yan, T. Xu, S.R. Yang, H.W. Liu, and Q.J. Xue J. Phys. D Appl. Phys. 37 2004 2416
- (2004) J. Phys. D Appl. Phys. , vol.37 , pp. 2416
- Yan, X.B.¹ Xu, T.² Yang, S.R.³ Liu, H.W.⁴ Xue, Q.J.⁵

38
- 17844410123
- G. Lazar, K. Zellama, I. Vascan, M. Stamate, I. Lazar, and I. Rusu J. Optoelectron. Adv. Mater. 7 2005 647
- (2005) J. Optoelectron. Adv. Mater. , vol.7 , pp. 647
- Lazar, G.¹ Zellama, K.² Vascan, I.³ Stamate, M.⁴ Lazar, I.⁵ Rusu, I.⁶

39
- 84904785637
- N. Hand-Zoubir, F. Boukhors, R. Baghdad, and K. Zellama Sci. Technol. A 28 2008 9
- (2008) Sci. Technol. A , vol.28 , pp. 9
- Hand-Zoubir, N.¹ Boukhors, F.² Baghdad, R.³ Zellama, K.⁴

40
- 0000578547
- J.K. Walters, R.J. Newport, S.F. Parker, W.S. Howells, and G. Bushnell-Wye J. Phys. Condens. Matter 10 1998 4161
- (1998) J. Phys. Condens. Matter , vol.10 , pp. 4161
- Walters, J.K.¹ Newport, R.J.² Parker, S.F.³ Howells, W.S.⁴ Bushnell-Wye, G.⁵

41
- 0032181961
- M. Sharon, S. Jain, P.D. Kichambare, and M. Kumar Mater. Chem. Phys. 56 1998 284
- (1998) Mater. Chem. Phys. , vol.56 , pp. 284
- Sharon, M.¹ Jain, S.² Kichambare, P.D.³ Kumar, M.⁴

42
- 84904785616
- K.W.R. Gilkes, S. Prawer, K.W. Nugent, J. Robertson, H.S. Sands, Y. Lifshitz, and X. Shi J. Appl. Phys. 87 2000 7284
- (2000) J. Appl. Phys. , vol.87 , pp. 7284
- Gilkes, K.W.R.¹ Prawer, S.² Nugent, K.W.³ Robertson, J.⁴ Sands, H.S.⁵ Lifshitz, Y.⁶ Shi, X.⁷

43
- 13444261122
- C.C. Chen, and F.C.N. Hong Appl. Surf. Sci. 242 2005 261
- (2005) Appl. Surf. Sci. , vol.242 , pp. 261
- Chen, C.C.¹ Hong, F.C.N.²

44
- 32144451546
- J.H. Choi, H.S. Ahn, S.C. Lee, and K.R. Lee J. Phys. Conf. Ser. 29 2006 155
- (2006) J. Phys. Conf. Ser. 29 , pp. 155
- Choi, J.H.¹ Ahn, H.S.² Lee, S.C.³ Lee, K.R.⁴

45
- 17944379512
- A.Y. Wang, H.S. Ahn, K.R. Lee, and J.P. Ahn Appl. Phys. Lett. 86 2005 111902
- (2005) Appl. Phys. Lett. , vol.86 , pp. 111902
- Wang, A.Y.¹ Ahn, H.S.² Lee, K.R.³ Ahn, J.P.⁴

46
- 0037343492
- J. Robertson Semicond. Sci. Technol. 18 2003 S12
- (2003) Semicond. Sci. Technol. , vol.18 , pp. 12
- Robertson, J.¹

47
- 84904785300
- G.A.J. Amaratunga, M. Chhowalla, D.A.I. Munindradasa, K.G. Lim, C.J. Kiely, I. Alexandrou, in: Proceedings of the First International Specialist Meeting on Amorphous Carbon, 1997, p. 311.
- (1997) Proceedings of the First International Specialist Meeting on Amorphous Carbon , pp. 311
- Amaratunga, G.A.J.¹ Chhowalla, M.² Munindradasa, D.A.I.³ Lim, K.G.⁴ Kiely, C.J.⁵ Alexandrou, I.⁶

48
- 84904785676
- D.R. McKenzie, E.G. Gerstner, in: Proceedings of the First International Specialist Meeting on Amorphous Carbon, 1997, pp. 3.
- (1997) Proceedings of the First International Specialist Meeting on Amorphous Carbon , pp. 3
- McKenzie, D.R.¹ Gerstner, E.G.²

49
- 33646008294
- S.S. Tinchev, Y. Dyulgerska, P. Nikolova, D. Grambole, U. Kreissig, and T. Babeva J. Optoelectron. Adv. Mater. 8 2006 308
- (2006) J. Optoelectron. Adv. Mater. , vol.8 , pp. 308
- Tinchev, S.S.¹ Dyulgerska, Y.² Nikolova, P.³ Grambole, D.⁴ Kreissig, U.⁵ Babeva, T.⁶

50
- 17144397231
- H.W. Choi, M.W. Moon, T.Y. Kim, K.R. Lee, and K.H. Oh Mater. Sci. Forum 475479 2005 3619
- (2005) Mater. Sci. Forum , vol.475-479 , pp. 3619
- Choi, H.W.¹ Moon, M.W.² Kim, T.Y.³ Lee, K.R.⁴ Oh, K.H.⁵

51
- 77249099338
- H.A. Atwater, and A. Polman Nat. Mater. 9 2010 205
- (2010) Nat. Mater. , vol.9 , pp. 205
- Atwater, H.A.¹ Polman, A.²

52
- 1642440300
- J.F. Lin, P.J. Wei, J.C. Pan, and C.F. Ai Diamond Relat. Mater. 13 2004 42
- (2004) Diamond Relat. Mater. , vol.13 , pp. 42
- Lin, J.F.¹ Wei, P.J.² Pan, J.C.³ Ai, C.F.⁴

53
- 0021411716
- B. Johnson, and S. Hogmark Thin Solid Films 114 1984 257
- (1984) Thin Solid Films , vol.114 , pp. 257
- Johnson, B.¹ Hogmark, S.²

54
- 65449164146
- H.S. Zhang, and K. Komvopoulos J. Appl. Phys. 105 2009 083305
- (2009) J. Appl. Phys. , vol.105 , pp. 083305
- Zhang, H.S.¹ Komvopoulos, K.²

55
- 70450231491
- H.S. Zhang, and K. Komvopoulos J. Appl. Phys. 106 2009 093504
- (2009) J. Appl. Phys. , vol.106 , pp. 093504
- Zhang, H.S.¹ Komvopoulos, K.²

56
- 0035494681
- X. Chen, and J.J. Vlassak J. Mater. Res. 16 2001 2974
- (2001) J. Mater. Res. , vol.16 , pp. 2974
- Chen, X.¹ Vlassak, J.J.²

57
- 0037039185
- R. Saha, and W.D. Nix Acta Mater. 50 2002 23
- (2002) Acta Mater. , vol.50 , pp. 23
- Saha, R.¹ Nix, W.D.²

58
- 22344451695
- M. Lejeune, M. Benlahsen, and P. Lemoine Solid State Commun. 135 2005 434
- (2005) Solid State Commun. , vol.135 , pp. 434
- Lejeune, M.¹ Benlahsen, M.² Lemoine, P.³

59
- 29244481981
- W. Gulbiski, S. Kukielka, Y. Pauleau, and F. Theiry Surf. Coat. Technol. 200 2005 2146
- (2005) Surf. Coat. Technol. , vol.200 , pp. 2146
- Gulbiski, W.¹ Kukielka, S.² Pauleau, Y.³ Theiry, F.⁴

60
- 0027609727
- M. Sakai Acta Met. Mater. 41 1993 1751
- (1993) Acta Met. Mater. , vol.41 , pp. 1751
- Sakai, M.¹

* 이 정보는 Elsevier사의 SCOPUS DB에서 KISTI가 분석하여 추출한 것입니다.