Effect of the bias voltage on the structure of carbon nitride films

Diamond and Related Materials

Volumn 13, Issue 4-8, 2004, Pages 1538-1542

  Champi, A ^a   Marques, F C ^c   Freire, F L ^b  

^a UNIVERSITY OF CAMPINAS   (Brazil)

^b PONTIFICAL CATHOLIC UNIVERSITY OF RIO DE JANEIRO   (Brazil)

^c NONE

Author keywords

Carbon nitride; Diamond like amorphous carbon (DAC) film; Graphite like amorphous carbon (GAC); Mechanical properties

Indexed keywords

AMORPHOUS MATERIALS; DIAMONDS; ELECTRIC POTENTIAL; GRAPHITE; METHANE; NITROGEN; VOLTAGE MEASUREMENT;

AMORPHOUS CARBON NITRIDE FILMS; BIAS VOLTAGE;

CARBON NITRIDE;

DIAMOND;

EID: 2442616923     PISSN: 09259635     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.diamond.2003.12.024     Document Type: Article

References (15)

1. Silva S.R.P. Robertson J. Amaratunga G.A.J. Rafferty B. Brown L.M. Schwan J.et al. J. Appl. Phys. 81 1997 2626
2. Franceschini D.F. Achete C.A. Freire F. Jr. Appl. Phys. Lett. 60 1992 3229
3. Liu A.M. Cohen M. Science 245 1989 841
4. Li D. Chung Y.W. Wong M.S. Sproul W.D. J. Appl. Phys. 74 1993 219
5. Yu K.M. Cohen M.L. Phys. Rev. B 49 1994 5934
6. Fujimoto F. Ogata K. Jpn. J. Appl. Phys. 32 1993 L420
7. Niu C. Lu Y.Z. Lieber C.M. Science 261 1993 334
8. Marton D. Boyd K.J. Al-Bayati A.H. Todorov S.S. Rabalais J.W. Phys. Rev. Lett 73 1994 118
9. Oliver W.C. Pharr G.M. J. Mater. Res. 7 1992 1564
10. de Lima M.M. Jr. Lacerda R.G. Vilcarromero J. Marques F.C. J. Appl. Phys. 86 1999 4936
11. Stoney G.C. Proc. R. Soc. Lond. A 32 1909 172
12. Freire F. Jr. Jpn. J. Appl. Phys. 36 1997 4886
13. Wang J.S. Sugimura Y. Evans A.G. Tredway W.K. Thin Solid Films 325 1998 163
14. Kaufman J.H. Metin S. Phys. Rev. B 39 1989 13053
15. Retajczyk T.F. Jr. Shina A.K. Appl. Phys. Lett. 36 2 1979 161