Plasma-deposited diamondlike carbon and related materials

IBM Journal of Research and Development

Volumn 43, Issue 1-2, 1999, Pages 147-161

  Grill, A ^a  

^a IBM T J WATSON RESEARCH CENTER   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

AMORPHOUS FILMS; SEMICONDUCTING DIAMONDS;

PLASMA-DEPOSITED DIAMONDLIKE CARBONS;

PLASMA ENHANCED CHEMICAL VAPOR DEPOSITION;

EID: 0032629103     PISSN: 00188646     EISSN: None     Source Type: Journal    
DOI: 10.1147/rd.431.0147     Document Type: Article

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