Optical properties of PECVD deposited DLC films prepared with air addition

Journal of Optoelectronics and Advanced Materials

Volumn 8, Issue 1, 2006, Pages 308-311

  Tinchev, S S ^a   Dyulgerska, Y ^a   Nikolova, P ^a   Grambole, D ^b   Kreissig, U ^b   Babeva, T Z ^c  

^a BULGARIAN ACADEMY OF SCIENCES   (Bulgaria)

^b INSTITUTE OF ION BEAM PHYSICS AND MATERIALS RESEARCH   (Germany)

^c CENTRAL LABORATORY OF PHOTOPROCESSES   (Bulgaria)

Author keywords

Diamond like carbon; PECVD; Thin films

Indexed keywords

BENZENE; CARBON FILMS; DIAMOND LIKE CARBON FILMS; FILM PREPARATION; LIGHT TRANSMISSION; OPTICAL PROPERTIES; PLASMA CVD; PLASMA ENHANCED CHEMICAL VAPOR DEPOSITION; THIN FILMS;

ATMOSPHERIC AIR; DC DISCHARGES; DIAMOND LIKE CARBON; DLC FILM; HYDROGEN CONTENTS; LOW VACUUM; OPTICAL APPLICATIONS;

OPTICAL FILMS;

EID: 33646008294     PISSN: 14544164     EISSN: None     Source Type: Journal    
DOI: None     Document Type: Article

References (14)

1. J. Robertson, Mater. Sci. Eng. Rep. R 37, 129 (2002).
2. A. Grill, IBM J. Research and Development 43, 147 (1999).
3. A. Grill, V. Patel, Diamond and Related Materials 2, 1519 (1993).
4. M. Guerino, M. Massi, H. S. Maciel, C. Otani, R. D. Mansano, P. Verdonck, J. Libardi, Diamond and Related Materials 13, 316 (2004).
5. A. A. Evtukh, H. Hartnagel, V. G. Litovchenko, M. O. Semenenko, O. Yilmazoglu, Semicond. Sci. Technol. 19, 923 (2004).
6. M. -S. Hwang, Ch. Lee, J. Mater. Science and Engineering B 75, 24 (2000).
7. D. F. Franceschini, C. A. Achete, F. L. Freire Jr., Appl. Phys. Lett. 60, 3229 (1992).
8. W. Rudolph, C. Bauer, K. Brankoff, D. Grambole, R. Grötzschel, C. Heiser, F. Herrmann, Nucl. Instr. and Meth. B 15, 508 (1986).
9. A. Grill, Thin Solid Films 355-356, 189 (1999).
10. K. Donnelly, D. P. Dowling, T. P. O'Brien, A. O'Leary, T. C. Kelly, Diamond and Related Materials 5, 445 (1996).
11. P. S. Andry, P. W. Pastel, W. J. Varhue, J. Mater. Res. 11, 221 (1996).
12. X.-M. He, S-T. Lee, I. Bello, A. C. Cheung, W. Z. Li, D. S. Chiu, Y. W. Lam, C. S. Lee, K. M. Leung, X. T. Zhou, J. Mater. Res. 14, 1617 (1999).
13. J. Walters, R. Newport, S. Parker, W. Howells, G. Bushnell-Wye, J. Phys. 10, 4161 (1998).
14. S. Prawer, K. W. Nugent, Y. Lifshitz, G. D. Lempert, E. Grossman, J. Kulik, I. Avigal, R. Kalish, Diamond and Related Materials 5, 433 (1996).