Tribological performance of ultrathin diamond-like carbon films prepared by plasma-based ion implantation

Journal of Physics D: Applied Physics

Volumn 41, Issue 5, 2008, Pages

  Liao, J X ^a   Li, E Q ^a   Tian, Z ^a   Pan, X F ^a   Xu, J ^a   Jin, L ^a   Yang, H G ^a  

^a UNIVERSITY OF ELECTRONIC SCIENCE AND TECHNOLOGY OF CHINA   (China)

Author keywords

[No Author keywords available]

Indexed keywords

FILM THICKNESS; ION IMPLANTATION; RAMAN SCATTERING; TRIBOLOGY; ULTRATHIN FILMS; X RAY PHOTOELECTRON SPECTROSCOPY;

ADHESIVE WEAR; DIAMOND-LIKE CARBON FILMS; PLASMA-BASED ION IMPLANTATION; SLIDING FRICTION;

CARBON FILMS;

EID: 42549094095     PISSN: 00223727     EISSN: 13616463     Source Type: Journal    
DOI: 10.1088/0022-3727/41/5/055305     Document Type: Article

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