Effect of air post contamination on mechanical properties of amorphous carbon nitride thin films

Solid State Communications

Volumn 135, Issue 7, 2005, Pages 434-439

  Lejeune, M ^a   Benlahsen, M ^a   Lemoine, P ^b  

^a Universite de Picardie Jules Verne   (France)

^b UNIVERSITY OF ULSTER   (United Kingdom)

Author keywords

A. Disordered systems; A. Surface and interfaces; A. Thin films; D. Mechanical properties

Indexed keywords

AMORPHOUS MATERIALS; CARBON NITRIDE; ELASTIC MODULI; GRAPHITE; INFRARED RADIATION; MAGNETRON SPUTTERING; MECHANICAL PROPERTIES; RAMAN SPECTROSCOPY; STRESS ANALYSIS; X RAY PHOTOELECTRON SPECTROSCOPY;

AIR POST CONTAMINATIONS; DISORDERED SYSTEMS; INFRARED (IR) ABSORPTION; NUCLEAR REACTION ANALYSIS (NRA); SURFACE AND INTERFACES;

THIN FILMS;

EID: 22344451695     PISSN: 00381098     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.ssc.2005.05.025     Document Type: Article

References (22)

1. L. Hultman, J. Neidhardt, N. Hellgren, H. Sjöström, and J.-E. Sundgren Mater. Res. Soc. Bull. 28 2003 194
2. S. Muhl, and J.M. Mendez Diamond Relat. Mater. 8 1999 1809
3. A.C. Ferrari, S.E. Rodil, and J. Robertson Phys. Rev. B 67 2003 155306
4. O. Durand-Drouhin, M. Benlahsen, M. Clin, and R. Bouzerar Appl. Surf. Lett. 233 4 2004 269
5. O. Durand-Drouhin, M. Benlahsen, M. Clin, and K. Zellama Diamond Relat. Mater. 13 10 2004 1854
6. A. Laskarakis, S. Logothetidis, C. Charitidis, M. Gioti, Y. Panayiotatos, M. Handrea, and W. Kautek Diamond Relat. Mater. 10 2001 1179
7. A.A. Voevodin, J.G. Jones, J. Zabinski, Zs. Czigány, and L. Hultman J. Appl. Phys. 92 2002 724
8. G.G. Stoney Proc. R. Soc. London, Ser. A 82 1909 172
9. P. Lemoine, J.F. Zhao, J.P. Quinn, J.A. McLaughlin, and P. Maguire Thin Solid Films 379 2000 166
10. M. Lejeune, O. Durand-Drouhin, S. Charvet, A. Grosman, C. Ortega, and M. Benlahsen Thin Solid Films 444 2003 1
11. M. Lejeune, O. Durand-Drouhin, K. Zellama, and M. Benlahsen Solid State Commun. 120 2001 337
12. C. Popov, L.M. Zambov, M.F. Plass, and W. Kulisch Thin Solid films 377 2000 156
13. J. Bulir, M. Jelinek, V. Vorlicek, J. Zemek, and V. Perina Thin Solid Films 292 1997 318
14. D. Beeman, J. Silverman, R. Lynds, and M.R. Anderson Phys. Rev. B 30 1984 870
15. F. Tuinstra, and J.L. Koenig J. Chem. Phys. 53 1970 1126
16. A.C. Ferrari, and J. Robertson Phys. Rev. B 61 2000 14095
17. A.C. Ferrari, and J. Robertson Phys. Rev. B 64 2001 75414
18. M. Lejeune, M. Benlahsen, and R. Bouzerar Appl. Phys. Lett. 84 3 2004 344
19. W.C. Oliver, and G.M. Pharr J. Mater. Res. 7 1992 1564
20. D. Papakostantinou, and P. Lemoine J. Phys.: Condens. Matter 13 2001 2971
21. I. Alexandrou, H.J. Scheibe, C.J. Kiely, A.J. Papworth, G.A. Amaratunga, and B. Schultrich Phys. Rev. B 60 15 1999 10903
22. H. Windischman Crit. Rev. Solid State Mater. Sci. 17 1992 547