Unusual stress behavior in W-incorporated hydrogenated amorphous carbon films

Applied Physics Letters

Volumn 86, Issue 11, 2005, Pages 1-3

  Wang, Ai Ying ^a   Ahn, Hyo Shin ^a,b   Lee, Kwang Ryeol ^a   Ahn, Jae Pyoung ^a  

^a Korea Institute of Science and Technology   (South Korea)

^b Seoul National University   (South Korea)

Author keywords

[No Author keywords available]

Indexed keywords

CARBON; COMPRESSIVE STRESS; COMPUTATIONAL METHODS; CONCENTRATION (PROCESS); HIGH RESOLUTION ELECTRON MICROSCOPY; ION BEAM ASSISTED DEPOSITION; STRESS ANALYSIS; SYNTHESIS (CHEMICAL); TRANSMISSION ELECTRON MICROSCOPY; TUNGSTEN;

AMORPHOUS CARBON FILMS; CARBON MATRIX; GRAZING INCIDENCE X-RAY DIFFRACTION (GIXRD); HYBRID DEPOSITION;

AMORPHOUS FILMS;

EID: 17944379512     PISSN: 00036951     EISSN: None     Source Type: Journal    
DOI: 10.1063/1.1883328     Document Type: Article

References (16)

1. X. Fan, E. C. Dickey, S. J. Pennycook, and M. K. Sunkara, Appl. Phys. Lett. 75, 2740 (1999).
2. P. Zhang, B. K. Tay, C. Q. Sun, and S. P. Lau, J. Vac. Sci. Technol. A 20, 1390 (2002).
3. B. Shi, W. J. Meng, L. E. Rehn, and P. M. Baldo, Appl. Phys. Lett. 81, 352 (2002).
4. C. Corbella, M. Vives, A. Pinyol, E. Bertran, C. Canal, M. C. Polo, and J. L. Andujar, Surf. Coat. Technol. 177, 409 (2002).
5. A. A. Voevodin, J. P. O'Neill, S. V. Prasad, and J. S. Zabinski, J. Vac. Sci. Technol. A 17, 986 (1999).
6. S. J. Park, K. R. Lee, D. H. Ko, and K. Y. Eun, Diamond Relat. Mater. 11, 1747 (2002).
7. D. M. Cao, B. Feng, W. J. Meng, L. E. Rehn, and P. M. Khonsari, Appl. Phys. Lett. 79, 329 (2001).
8. K. Oguri and T. Aral, Surf. Coat. Technol. 47, 710 (1990).
9. W. J. Meng, R. C. Tittsworth, J. C. Jiang, B. Feng, D. M. Cao, K. Winkler, and V. Palshin, J. Appl. Phys. 88, 2415 (2000).
10. C.-S. Lee, K.-R. Lee, K.-Y. Eun, K.-H. Yoon, and J.-H. Han, Diamond Relat. Mater. 11, 198 (2002).
11. A. A. Voevodin, M. A. Capano, S. J. P. Laube, M. S. Donley, and J. S. Zabinski, Thin Solid Films 298, 107 (1997).
12. O. R. Monteiro, M. P. D. Ogletree, R. Y. Lo, R. Winand, and I. Brown, Surf. Coat. Technol. 94, 220 (1997).
13. P. J. Fallon, V. S. Veerasamy, C. A. Davis, J. Robertson, G. A. J. Amearatunga, W. I. Milne, and J. Koshinen, Phys. Rev. B 48, 4777 (1993).
14. J. Robertson, Semicond. Sci. Technol. 18, S12 (2003).
15. A. A. Voevodin, S. V. Prasad, and J. S. Zabinski, J. Appl. Phys. 82, 855 (1997).
16. B. Delly, J. Chem. Phys. 92, 508 (1990).