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Volumn 304, Issue 1-3, 2002, Pages 251-258

Amorphous hydrogenated carbon films: Effects of nitrogen and fluorine incorporation on the film microstructure and mechanical properties: A review

(1) Freire Jr , F L a

a PONTIFICAL CATHOLIC UNIVERSITY OF RIO DE JANEIRO (Brazil)

Author keywords

[No Author keywords available]

Indexed keywords

CARBON; CHEMICAL BONDS; FLUORINE; HYDROGENATION; ION BEAMS; MICROSTRUCTURE; NITROGEN; PLASMA ENHANCED CHEMICAL VAPOR DEPOSITION; PROFILOMETRY; RAMAN SPECTROSCOPY; X RAY PHOTOELECTRON SPECTROSCOPY;

AMORPHOUS HYDROGENATED CARBON FILMS;

AMORPHOUS FILMS;

EID: 0036605287 PISSN: 00223093 EISSN: None Source Type: Journal
DOI: 10.1016/S0022-3093(02)01031-1 Document Type: Conference Paper

Times cited : (28)

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