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Volumn 5714, Issue , 2005, Pages 24-36

Femtosecond laser ablation and deposition of metal films on transparent substrates with applications in photomask repair

Author keywords

Femtosecond laser ablation; Metal deposition; Photomask repair

Indexed keywords

FEMTOSECOND LASER ABLATION; METAL DEPOSITION; PHOTOMASK REPAIR; SPATIAL RESOLUTION;

CHROMIUM; GALLIUM; GLASS FIBERS; INTEGRATED CIRCUITS; NATURAL FREQUENCIES; SAPPHIRE; SOLID STATE LASERS; TITANIUM; ULTRASHORT PULSES;

LASER ABLATION;

EID: 21844439206 PISSN: 0277786X EISSN: None Source Type: Conference Proceeding
DOI: 10.1117/12.601008 Document Type: Conference Paper

Times cited : (11)

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