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Volumn 101, Issue 3, 2010, Pages 475-481
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Enhancement of resolution and quality of nano-hole structure on GaN substrates using the second-harmonic beam of near-infrared femtosecond laser
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Author keywords
[No Author keywords available]
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Indexed keywords
2-D PHOTONIC CRYSTALS;
ACID SOLUTIONS;
BLUE LEDS;
CALCULATED VALUES;
EXPERIMENTAL VALUES;
FEMTOSECOND (FS) LASER;
GAN SUBSTRATE;
HIGH NA OBJECTIVE LENS;
HOLE STRUCTURES;
LIGHT-EXTRACTION EFFICIENCY;
LOWER ENERGIES;
NANOFABRICATION;
NEAR INFRARED;
PERIODIC NANOSTRUCTURE;
PULSE ENERGIES;
SECOND HARMONICS;
SECOND-HARMONIC;
TWO-PHOTON ABSORPTIONS;
WET CHEMICAL TREATMENT;
WIDE-BAND-GAP SEMICONDUCTOR;
ABLATION;
EXTRACTION;
FABRICATION;
GALLIUM ALLOYS;
GALLIUM NITRIDE;
HARMONIC ANALYSIS;
HYDROCHLORIC ACID;
INFRARED DEVICES;
LASER PULSES;
PHOTONIC CRYSTALS;
PULSED LASER APPLICATIONS;
SEMICONDUCTOR LASERS;
SUBSTRATES;
TWO DIMENSIONAL;
TWO PHOTON PROCESSES;
ULTRAFAST LASERS;
INFRARED LASERS;
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EID: 78049335894
PISSN: 09478396
EISSN: 14320630
Source Type: Journal
DOI: 10.1007/s00339-010-5947-y Document Type: Article |
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Times cited : (16)
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References (14)
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