Femtosecond-laser-induced nanostructure formed on hard thin films of TiN and DLC

Applied Physics A: Materials Science and Processing

Volumn 76, Issue 6, 2003, Pages 983-985

  Yasumaru, N ^a   Miyazaki, K ^b   Kiuchi, J ^c  

^a FUKUI NATIONAL COLLEGE OF TECHNOLOGY   (Japan)

^b KYOTO UNIVERSITY   (Japan)

^c Eyetec Co Ltd   (Japan)

Author keywords

[No Author keywords available]

Indexed keywords

DIAMOND LIKE CARBON FILMS; LASER ABLATION; LASER PULSES; LIGHT POLARIZATION; NANOSTRUCTURED MATERIALS; SURFACE STRUCTURE; TITANIUM NITRIDE;

LASER POLARIZATION;

THIN FILMS;

EID: 0037390572     PISSN: 09478396     EISSN: None     Source Type: Journal    
DOI: 10.1007/s00339-002-1979-2     Document Type: Conference Paper

References (11)

1. N. Yasumaru, K. Tsuchida, E. Saji, T. Ibe: Mater. Trans. JIM 34, 696 (1993)
2. J. Bonse, M. Geuß, S. Baudach, H. Sturm, W. Kautek: Appl. Phys. A 69, S399 (1999)
3. J. Bonse, P. Rudolph, J. Krüger, S. Baudach, W. Kautek: Appl. Surf. Sci. 154-155, 659 (2000)
4. J. Bonse, H. Sturm, D. Schmidt, W. Kautek: Appl. Phys. A 71, 657 (2000)
5. See, for example, D. Bäuerle: Laser Processing and Chemistry (Springer, Berlin 1996) Chapt. 28
6. T. Shimizu, K. Miyazaki, D. Normand: In Tech. Dig. CLEO/Pacific Rim 2001, Chiba, 2001, Vol. 1, p. 1-336
7. S.R.J. Brueck, D.J. Ehrlich: Phys. Rev. Lett. 48, 1678 (1982)
8. D.J. Ehrlich, S.R.J. Brueck, J.Y. Tsao: Appl. Phys. Lett. 41, 630 (1982)
9. H. Kumagai, M. Ezaki, K. Toyoda, M. Obara: Jpn. J. Appl. Phys. 31, 4433 (1992)
10. D. Ashkenasai, A. Rosenfeld, H. Varel, M. Wähmer, E.E.B. Campbell: Appl. Surf. Sci. 120, 65 (1997)
11. Y. Minami, K. Toyoda: Rev. Laser Eng. 28, 824 (2000) [in Japanese]