Microstructuring of silicon with femtosecond laser pulses

Applied Physics Letters

Volumn 73, Issue 12, 1998, Pages 1673-1675

  Her, Tsing Hua ^a   Finlay, Richard J ^a   Wu, Claudia ^a   Deliwala, Shrenik ^a   Mazur, Eric ^a  

^a HARVARD UNIVERSITY   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

EID: 0000050015     PISSN: 00036951     EISSN: None     Source Type: Journal    
DOI: 10.1063/1.122241     Document Type: Article

References (18)

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