Near-field scanning microwave microscopy: An emerging research tool for nanoscale metrology

IEEE Microwave Magazine

Volumn 15, Issue 1, 2014, Pages 52-64

  Imtiaz, Atif ^a   Wallis, Thomas Mitchell ^a   Kabos, Pavel ^a  

^a NATIONAL INSTITUTE OF STANDARDS AND TECHNOLOGY   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

ATOMIC-SCALE MANIPULATION; CALIFORNIA INSTITUTE OF TECHNOLOGY; MOLECULAR-SCALE DEVICES; NANOSCALE METROLOGIES; NANOSCIENCE AND NANOTECHNOLOGIES; NEAR-FIELD SCANNING; PHYSICAL SOCIETIES; THE SCANNING ELECTRON MICROSCOPES (SEM);

ATOMIC FORCE MICROSCOPY; MEASUREMENTS; MOLECULES; NANOSCIENCE; QUANTUM THEORY; SCANNING ELECTRON MICROSCOPY; UNITS OF MEASUREMENT;

TOOLS;

EID: 84893510377     PISSN: 15273342     EISSN: None     Source Type: Journal    
DOI: 10.1109/MMM.2013.2288711     Document Type: Article

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