Near-field antenna as a Scanning Microwave Probe for characterization of materials and devices

EuCAP 2010 - The 4th European Conference on Antennas and Propagation

Volumn , Issue , 2010, Pages

  Imtiaz, Atif ^a   Wallis, T Mitch ^a   Lim, Sang H ^a   Chisum, Jonathan ^b   Popovic, Zoya ^b   Kabos, Pavel ^a  

^a NATIONAL INSTITUTE OF STANDARDS AND TECHNOLOGY   (United States)

^b UCB 450   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

1.8 GHZ; CMOS IC; FREQUENCY RANGES; LENGTH SCALE; METAL LAYER; METROLOGY TOOLS; MICROWAVE PROBES; NEAR-FIELD ANTENNAS; Q-FACTORS; SPATIAL RESOLUTION; SPATIALLY RESOLVED; STRATIFIED MEDIUM; SUB-SURFACES; SUBMICRON;

DATA FLOW ANALYSIS; PROBES; SECURITY OF DATA; SURFACE PROPERTIES;

ANTENNAS;

EID: 77955312336     PISSN: None     EISSN: None     Source Type: Conference Proceeding    
DOI: None     Document Type: Conference Paper

References (10)

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