Quantitative measurement of electric properties on the nanometer scale using atomic force microscopy

IEEE - 2011 Semiconductor Conference Dresden: Technology, Design, Packaging, Simulation and Test, SCD 2011 - International Conference, Workshop and Table-Top Exhibition

Volumn , Issue , 2011, Pages

  Fenner, Matthias A ^a   Kienberger, Ferry ^a   Tanbakuchi, Hassan ^a   Huber, Hans Peter ^b   Hinterdorfer, Peter ^b  

^a AGILENT TECHNOLOGIES   (Germany)

^b JOHANNES KEPLER UNIVERSITY LINZ   (Austria)

Author keywords

Atomic Force Microscope; Calibration; Capacitance; Dopant Density; Scanning Microwave Microscopy

Indexed keywords

ATOMIC FORCE MICROSCOPES; DENSITY DISTRIBUTIONS; INCIDENT WAVES; MICROWAVE MICROSCOPY; MICROWAVE SIGNALS; NANO-METER SCALE; QUANTITATIVE MEASUREMENT; SEMI-CONDUCTOR SURFACES; SPATIAL RESOLUTION; VECTOR NETWORK ANALYZERS;

ATOMIC FORCE MICROSCOPY; CALIBRATION; CAPACITANCE; ELECTRIC NETWORK ANALYZERS; MICROWAVES;

CHIP SCALE PACKAGES;

EID: 82155197768     PISSN: None     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.1109/SCD.2011.6068750     Document Type: Conference Paper

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