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Volumn 24, Issue 12, 2013, Pages

Sensitive determination of the Young's modulus of thin films by polymeric microcantilevers

(8) Colombi, Paolo a Bergese, Paolo b Bontempi, Elza b Borgese, Laura b Federici, Stefania b Keller, Stephan Sylvest c Boisen, Anja c Depero, Laura Eleonora b

a CSMT Gestione Scarl (Italy)

b UNIVERSITY OF BRESCIA (Italy)

c TECHNICAL UNIVERSITY OF DENMARK (Denmark)

Author keywords

ALD; polymeric SU 8 microcantilevers; thin films; titanium oxide; Young's modulus

Indexed keywords

AMORPHOUS FILMS; ATOMIC LAYER DEPOSITION; CHEMICAL SENSORS; COMPOSITE MICROMECHANICS; DENSITY (SPECIFIC GRAVITY); ELASTIC MODULI; NATURAL FREQUENCIES; OXIDE FILMS; POLYMER FILMS; POLYMERS; TEMPERATURE; TITANIUM DIOXIDE; TITANIUM OXIDES;

DIFFERENT THICKNESS; LOW TEMPERATURES; MASS DENSITIES; MICRO-CANTILEVERS; RESONANT FREQUENCY SHIFT; SIZE DEPENDENT; THEORETICAL MODELING; THICKNESS RESOLUTION;

THIN FILMS;

EID: 84889576407 PISSN: 09570233 EISSN: 13616501 Source Type: Journal
DOI: 10.1088/0957-0233/24/12/125603 Document Type: Article

Times cited : (15)

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