Deposition of biopolymer films on micromechanical sensors

Microelectronic Engineering

Volumn 88, Issue 8, 2011, Pages 2297-2299

  Keller, Stephan S ^a   Gammelgaard, Lene ^a   Jensen, Marie P ^a   Schmid, Silvan ^a   Davis, Zachary J ^a   Boisen, Anja ^a  

^a TECHNICAL UNIVERSITY OF DENMARK   (Denmark)

Author keywords

Biopolymer; PLLA; Spray coating; SU 8 cantilever

Indexed keywords

BIOPOLYMER FILMS; ENZYMATIC DEGRADATION; MICRO-CANTILEVERS; MICROMECHANICAL SENSORS; PLLA; POLY-L-LACTIDE; PROCESSING CONDITION; RESONANCE FREQUENCIES; SPRAY COATING; SU-8 CANTILEVER;

BIODEGRADABLE POLYMERS; BIOMOLECULES; COATINGS; MECHANICAL PROPERTIES; NANOCANTILEVERS; RESONANCE;

DEPOSITION;

EID: 79960044925     PISSN: 01679317     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.mee.2011.02.093     Document Type: Conference Paper

References (12)

1. C. Bastioli (Ed.), Handbook of Biodegradable Polymers, Rapra Technology Ltd., Shawbury, 2005.
2. A. Södergrd, and M. Stolt Prog. Polym. Sci. 27 2002 1123 1163
3. T. Hayashi Prog. Polym. Sci. 19 1994 663 702
4. K. Yamashita, Y. Kikkawa, K. Kurokawa, and Y. Doi Biomacromolecules 6 2005 850 857
5. N. Jung, H. Seo, D. Lee, Ch. Ryu, and S. Jeon Macromolecules 41 2008 6873 6875
6. N.P. Pham, J.N. Burghartz, and P.M. Sarro J. Micromech. Microeng. 15 2005 691 697
7. D. Haefliger, M. Nordström, P.A. Rasmussen, and A. Boisen Microelectron. Eng. 78-79 2005 88 92
8. Ch. Ziegler, Anal. Bioanal. Chem. 379 (2004) 946-959.
9. R. Sandberg, W. Svendsen, K. Mølhave, and A. Boisen J. Micromech. Microeng. 15 2005 1454 1458
10. R. Feng, and R.J. Farris J. Mater. Sci. 37 2002 4795 4801
11. M. Hopcroft, T. Kramer, G. Kim, K. Takashima, Y. Higo, D. Moore, and J. Brugger Fatigue Fract. Eng. Mater. Struct. 28 2005 735
12. .