메뉴 건너뛰기




Volumn 44, Issue 25-26, 2007, Pages 8313-8334

On the determination of the Young's modulus of thin films using indentation tests

Author keywords

Numerical simulation; Thin films; Vickers indentation

Indexed keywords

COMPOSITE MATERIALS; INDENTATION; NUMERICAL METHODS; THIN FILMS; THREE DIMENSIONAL; VICKERS HARDNESS;

EID: 35548945419     PISSN: 00207683     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.ijsolstr.2007.06.015     Document Type: Article
Times cited : (76)

References (27)
  • 5
    • 45549118580 scopus 로고
    • Analysis of elastic and plastic deformation associated with indentation testing of thin films on substrates
    • Bhattacharya A.K., and Nix W.D. Analysis of elastic and plastic deformation associated with indentation testing of thin films on substrates. International Journal of Solids Structures 24 12 (1988) 1287-1298
    • (1988) International Journal of Solids Structures , vol.24 , Issue.12 , pp. 1287-1298
    • Bhattacharya, A.K.1    Nix, W.D.2
  • 6
    • 0030379359 scopus 로고    scopus 로고
    • Bolshakov, A., Oliver, W.C., Pharr, G.M., 1997. Finite element studies of the influence of pile-up on the analysis of nanoindentation data. Materials Research Society Symposium Proceedings, vol. 436, pp. 141-146.
  • 7
    • 0023310471 scopus 로고
    • The mechanical properties of wear-resistant coatings II: experimental studies and interpretation of hardness
    • Burnett P.J., and Rickerby D.S. The mechanical properties of wear-resistant coatings II: experimental studies and interpretation of hardness. Thin Solid Films 148 1 (1987) 51-65
    • (1987) Thin Solid Films , vol.148 , Issue.1 , pp. 51-65
    • Burnett, P.J.1    Rickerby, D.S.2
  • 8
    • 0029322712 scopus 로고
    • Nanoindentation of amourphous aluminum oxide films II. Critical parameters for the breakthrough and a membrane effect in thin hard films on soft substrates
    • Chechenin N.G., Bottiger J., and Krog J.P. Nanoindentation of amourphous aluminum oxide films II. Critical parameters for the breakthrough and a membrane effect in thin hard films on soft substrates. Thin Solid Films 261 (1995) 219-227
    • (1995) Thin Solid Films , vol.261 , pp. 219-227
    • Chechenin, N.G.1    Bottiger, J.2    Krog, J.P.3
  • 9
    • 0035494681 scopus 로고    scopus 로고
    • A numerical study on the measurements of thin film mechanical properties by means of nanoindentation
    • Chen X., and Vlassak J.J. A numerical study on the measurements of thin film mechanical properties by means of nanoindentation. Journal of Materials Research 16 10 (2001) 2974-2982
    • (2001) Journal of Materials Research , vol.16 , Issue.10 , pp. 2974-2982
    • Chen, X.1    Vlassak, J.J.2
  • 10
    • 84974183414 scopus 로고
    • A method for interpreting the data from depth-sensing indentation instruments
    • Doerner M.F., and Nix W.D. A method for interpreting the data from depth-sensing indentation instruments. Journal of Materials Research 1 4 (1986) 601-609
    • (1986) Journal of Materials Research , vol.1 , Issue.4 , pp. 601-609
    • Doerner, M.F.1    Nix, W.D.2
  • 11
    • 84945770363 scopus 로고
    • Plastic properties of thin fims on substrates as measured by submicron indentation hardness and substrate curvature techniques
    • Doerner M.F., Gardner D.S., and Nix W.D. Plastic properties of thin fims on substrates as measured by submicron indentation hardness and substrate curvature techniques. Journal of Materials Research 1 6 (1986) 845-851
    • (1986) Journal of Materials Research , vol.1 , Issue.6 , pp. 845-851
    • Doerner, M.F.1    Gardner, D.S.2    Nix, W.D.3
  • 12
    • 0026955534 scopus 로고
    • The determination of film hardness from the composite response of film and substrate to nanometer scale indentations
    • Fabes B.D., Oliver W.C., McKee R.A., and Walker F.J. The determination of film hardness from the composite response of film and substrate to nanometer scale indentations. Journal of Materials Research 7 11 (1992) 3056-3064
    • (1992) Journal of Materials Research , vol.7 , Issue.11 , pp. 3056-3064
    • Fabes, B.D.1    Oliver, W.C.2    McKee, R.A.3    Walker, F.J.4
  • 13
    • 0027085491 scopus 로고
    • Elastic contact versus indentation modeling of multi-layered Materials
    • Gao H.J., Chiu C.H., and Lee J. Elastic contact versus indentation modeling of multi-layered Materials. International Journal of Solids Structures 29 20 (1992) 2471-2492
    • (1992) International Journal of Solids Structures , vol.29 , Issue.20 , pp. 2471-2492
    • Gao, H.J.1    Chiu, C.H.2    Lee, J.3
  • 14
    • 0025237934 scopus 로고
    • A new method for analyzing data from continuous depth-sensing microindentation tests
    • Joslin D.L., and Oliver W.C. A new method for analyzing data from continuous depth-sensing microindentation tests. Journal of Materials Research 5 1 (1990) 123-126
    • (1990) Journal of Materials Research , vol.5 , Issue.1 , pp. 123-126
    • Joslin, D.L.1    Oliver, W.C.2
  • 15
    • 0023533637 scopus 로고
    • Elastic analysis of some punch problems for a layered medium
    • King R.B. Elastic analysis of some punch problems for a layered medium. International Journal of Solids and Structures 23 12 (1987) 1657-1664
    • (1987) International Journal of Solids and Structures , vol.23 , Issue.12 , pp. 1657-1664
    • King, R.B.1
  • 18
    • 0033877050 scopus 로고    scopus 로고
    • Three-dimensional numerical simulation of the deep-drawing process using solid finite elements
    • Menezes L.F., and Teodosiu C. Three-dimensional numerical simulation of the deep-drawing process using solid finite elements. Journal of Materials Processing Technology 97 1-3 (2000) 100-106
    • (2000) Journal of Materials Processing Technology , vol.97 , Issue.1-3 , pp. 100-106
    • Menezes, L.F.1    Teodosiu, C.2
  • 19
    • 0026875935 scopus 로고
    • An improved technique for determining hardness and elastic modulus using load and displacement sensing indentation experiments
    • Oliver W.C., and Pharr G.M. An improved technique for determining hardness and elastic modulus using load and displacement sensing indentation experiments. Journal of Materials Research 7 6 (1992) 1564-1583
    • (1992) Journal of Materials Research , vol.7 , Issue.6 , pp. 1564-1583
    • Oliver, W.C.1    Pharr, G.M.2
  • 20
    • 0027908019 scopus 로고
    • Using nanoindentation techniques for the characterization of coated systems: a critique
    • Page T.F., and Hainsworth S.V. Using nanoindentation techniques for the characterization of coated systems: a critique. Surface and Coatings Technology 61 1-3 (1993) 201-208
    • (1993) Surface and Coatings Technology , vol.61 , Issue.1-3 , pp. 201-208
    • Page, T.F.1    Hainsworth, S.V.2
  • 21
    • 84971928468 scopus 로고
    • Measurement of thin-film mechanical properties using Nanoindentation
    • Pharr G.M., and Oliver W.C. Measurement of thin-film mechanical properties using Nanoindentation. Materials Research Society Bulletin 17 7 (1992) 28-33
    • (1992) Materials Research Society Bulletin , vol.17 , Issue.7 , pp. 28-33
    • Pharr, G.M.1    Oliver, W.C.2
  • 22
    • 0037039185 scopus 로고    scopus 로고
    • Effects of the substrate on the determination of thin film mechanical properties by nanoindentation
    • Saha R., and Nix W.D. Effects of the substrate on the determination of thin film mechanical properties by nanoindentation. Acta Materialia 50 (2002) 23-38
    • (2002) Acta Materialia , vol.50 , pp. 23-38
    • Saha, R.1    Nix, W.D.2
  • 23
    • 0011713787 scopus 로고
    • The relation between load and penetration in the axisymmetric Boussinesq problem for a punch of arbitrary profile
    • Sneddon I.N. The relation between load and penetration in the axisymmetric Boussinesq problem for a punch of arbitrary profile. International Journal of Engineering and Science 3 (1965) 47-57
    • (1965) International Journal of Engineering and Science , vol.3 , pp. 47-57
    • Sneddon, I.N.1
  • 24
    • 0001502951 scopus 로고
    • Finite element analysis of the critical ratio of coating thickness to indentation depth for coating property measurements by nanoindentation
    • Sun Y., Bell T., and Zheng S. Finite element analysis of the critical ratio of coating thickness to indentation depth for coating property measurements by nanoindentation. Thin Solid Films 258 1-2 (1995) 198-204
    • (1995) Thin Solid Films , vol.258 , Issue.1-2 , pp. 198-204
    • Sun, Y.1    Bell, T.2    Zheng, S.3
  • 25
    • 0032686029 scopus 로고    scopus 로고
    • Indentation plastic displacement field: Part I. The case of soft films on hard substrates
    • Tsui T.Y., Vlassak J., and Nix W.D. Indentation plastic displacement field: Part I. The case of soft films on hard substrates. Journal of Materials Research 14 6 (1999) 2196-2203
    • (1999) Journal of Materials Research , vol.14 , Issue.6 , pp. 2196-2203
    • Tsui, T.Y.1    Vlassak, J.2    Nix, W.D.3
  • 26
    • 0032662723 scopus 로고    scopus 로고
    • Indentation plastic displacement field: Part II. The case of hard films on soft substrates
    • Tsui T.Y., Vlassak J., and Nix W.D. Indentation plastic displacement field: Part II. The case of hard films on soft substrates. Journal of Materials Research 14 6 (1999) 2204-2209
    • (1999) Journal of Materials Research , vol.14 , Issue.6 , pp. 2204-2209
    • Tsui, T.Y.1    Vlassak, J.2    Nix, W.D.3
  • 27
    • 0032647950 scopus 로고    scopus 로고
    • Substrate effects on nanoindentation mechanical property measurement of soft films on hard substrates
    • Tsui T.Y., and Pharr G.M. Substrate effects on nanoindentation mechanical property measurement of soft films on hard substrates. Journal of Materials Research 14 1 (1999) 292-301
    • (1999) Journal of Materials Research , vol.14 , Issue.1 , pp. 292-301
    • Tsui, T.Y.1    Pharr, G.M.2


* 이 정보는 Elsevier사의 SCOPUS DB에서 KISTI가 분석하여 추출한 것입니다.