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Volumn 12, Issue 35, 2010, Pages 10577-10583

Diffusion of water into SU-8 microcantilevers

(9) Liu, Chuanjun a,b Liu, Ying a Sokuler, Mordechai a,b Fell, Daniela a Keller, Stephan c Boisen, Anja c Butt, Hans Jürgen a Auernhammer, Günter K a Bonaccurso, Elmar a,b

a MAX PLANCK INSTITUTE FOR POLYMER RESEARCH (Germany)

b DARMSTADT UNIVERSITY OF TECHNOLOGY (Germany)

c TECHNICAL UNIVERSITY OF DENMARK (Denmark)

Author keywords

[No Author keywords available]

Indexed keywords

EID: 77957989397 PISSN: 14639076 EISSN: None Source Type: Journal
DOI: 10.1039/c002478c Document Type: Article

Times cited : (27)

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