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Volumn 10, Issue 12, 2001, Pages 2190-2194
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Characterization of AFM cantilevers coated with diamond-like carbon
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Author keywords
AFM cantilevers; Elastic modulus; Resonance frequency
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Indexed keywords
ATOMIC FORCE MICROSCOPY;
COATING TECHNIQUES;
ELASTIC MODULI;
NATURAL FREQUENCIES;
COATED CANTILEVERS;
DIAMOND LIKE CARBON FILMS;
CANTILEVERED STRUCTURE;
COATING;
DIAMOND-LIKE CARBON;
ELASTICITY;
RESONANCE;
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EID: 0035576959
PISSN: 09259635
EISSN: None
Source Type: Journal
DOI: 10.1016/S0925-9635(01)00502-7 Document Type: Article |
Times cited : (27)
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References (17)
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