Micromechanical testing of SU-8 cantilevers

Fatigue and Fracture of Engineering Materials and Structures

Volumn 28, Issue 8, 2005, Pages 735-742

  Hopcroft, M ^a   Kramer, T ^b   Kim, G ^b,d   Takashima, K ^c   Higo, Y ^c   Moore, D ^a   Brugger, Juergen ^b  

^a UNIVERSITY OF CAMBRIDGE   (United Kingdom)

^b EPFL   (Switzerland)

^c TOKYO INSTITUTE OF TECHNOLOGY   (Japan)

^d Kyungpook National University   (South Korea)

Author keywords

AFM cantilevers; Microscale mechanical test; SU 8; Surface profliometer; Young's modulus

Indexed keywords

ATOMIC FORCE MICROSCOPY; ELASTIC MODULI; MECHANICAL PROPERTIES; MECHANICAL TESTING; MICROELECTROMECHANICAL DEVICES; OPTICAL MICROSCOPY; PROFILOMETRY;

AFM CANTILEVERS; MICROSCALE MECHANICAL TEST; PHOTOPLASTIC POLYMER; SURFACE PROFILOMETER;

POLYMERS;

EID: 22544473613     PISSN: 8756758X     EISSN: None     Source Type: Journal    
DOI: 10.1111/j.1460-2695.2005.00873.x     Document Type: Article

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