Petri net-based cycle time analysis of dual-arm cluster tools with wafer revisiting and swapping strategy

Proceedings - IEEE International Conference on Robotics and Automation

Volumn , Issue , 2011, Pages 5499-5504

  Wu, Naiqi ^a   Chu, Feng ^b   Chu, Chengbin ^c   Zhou, Mengchu ^d,e  

^a GUANGDONG UNIVERSITY OF TECHNOLOGY   (China)

^b UNIVERSITY OF EVRY   (France)

^c ECOLE CENTRALE PARIS   (France)

^d Department of Computer Science and Technology   (China)

^e NEW JERSEY INSTITUTE OF TECHNOLOGY   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

CLUSTER TOOL; CYCLE TIME; PETRI NET MODELS; SYSTEMATIC METHOD; TRANSIENT STATE; WAFER FABRICATIONS;

PETRI NETS; ROBOTICS; TOOLS;

SEMICONDUCTOR DEVICE MANUFACTURE;

EID: 82455167620     PISSN: 10504729     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.1109/ICRA.2011.5980119     Document Type: Conference Paper

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