Modeling and analysis of dual-arm cluster tools for wafer fabrication with revisiting

IEEE International Conference on Automation Science and Engineering

Volumn , Issue , 2011, Pages 90-95

  Qiao, Yan ^a   Wu, NaiQi ^a   Zhou, MengChu ^b,c  

^a GUANGDONG UNIVERSITY OF TECHNOLOGY   (China)

^b Department of Computer Science and Technology   (China)

^c NEW JERSEY INSTITUTE OF TECHNOLOGY   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

ANALYTICAL EXPRESSIONS; CLUSTER TOOL; CYCLE TIME; ILLUSTRATIVE EXAMPLES; MODELING AND ANALYSIS; PETRI NET MODELS; PROCESS SWITCHES; PROCESSING MODULES; STEADY STATE; WAFER FABRICATIONS;

ATOMIC LAYER DEPOSITION;

PETRI NETS;

EID: 82455192498     PISSN: 21618070     EISSN: 21618089     Source Type: Conference Proceeding    
DOI: 10.1109/CASE.2011.6042403     Document Type: Conference Paper

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