Recent developments in the field of transparent conductive oxide films for spectral selective coatings, electronics and photovoltaics

Current Applied Physics

Volumn 12, Issue SUPPL.4, 2012, Pages

  Szyszka, Bernd ^a   Dewald, Wilma ^a   Gurram, Sanjeev Kumar ^a   Pflug, Andreas ^a   Schulz, Christina ^a   Siemers, Michael ^a   Sittinger, Volker ^a   Ulrich, Stephan ^a  

^a FRAUNHOFER INSTITUTE FOR SURFACE ENGINEERING AND THIN FILMS IST   (Germany)

Author keywords

Gas flow sputtering; Large area TCOs; Magnetron sputtering; Megatron sputtering; Oxide semiconductors

Indexed keywords

A-SI:H; ACTIVE MATRIX OLED; AUTOMOTIVE APPLICATIONS; COATING TECHNOLOGIES; EMERGING PRODUCTS; GAS FLOW SPUTTERING; HIGH POWER IMPULSE MAGNETRON SPUTTERING (HIPIMS); HIGH RESOLUTION; HIGH TRANSMITTANCE; INDUSTRIAL COATINGS; LARGE AREA TCOS; LATEST DEVELOPMENT; MARKET PULL; METALLIC CONDUCTIVITY; MODEL-BASED OPC; OXIDE SEMICONDUCTOR; P-TYPE; PHOTOVOLTAICS; PROCESS DEVELOPMENT; SELECTIVE COATINGS; SEMICONDUCTIVE; THIN FILM PHOTOVOLTAICS; THIN FILM SOLAR CELLS; THIN FILMS SOLAR CELLS; TRANSPARENT CONDUCTIVE OXIDE FILMS; TRANSPARENT CONDUCTIVE OXIDES; VISIBLE SPECTRA; ZNO:AL FILMS;

COATINGS; FLAT PANEL DISPLAYS; LIQUID CRYSTAL DISPLAYS; MAGNETRON SPUTTERING; OPTOELECTRONIC DEVICES; OXIDE FILMS; SILICON; SOLAR CELLS; THIN FILMS; TIN; WINDSHIELDS; ZINC OXIDE;

NANOSTRUCTURED MATERIALS;

EID: 84871920722     PISSN: 15671739     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.cap.2012.07.022     Document Type: Conference Paper

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