Structural study of Ti O2 -based transparent conducting films

Journal of Vacuum Science and Technology A: Vacuum, Surfaces and Films

Volumn 26, Issue 4, 2008, Pages 1027-1029

  Hitosugi, T ^a,b   Yamada, N ^b   Nakao, S ^b   Hatabayashi, K ^a   Shimada, T ^a,b   Hasegawa, T ^a,b  

^a UNIVERSITY OF TOKYO   (Japan)

^b KANAGAWA ACADEMY OF SCIENCE AND TECHNOLOGY   (Japan)

Author keywords

[No Author keywords available]

Indexed keywords

ELECTRON MICROSCOPES; FILM GROWTH; MICROSCOPES; MOLECULAR BEAM EPITAXY; NIOBIUM; PROGRAMMABLE LOGIC CONTROLLERS; PULSED LASER APPLICATIONS; PULSED LASER DEPOSITION; SPUTTERING; SULFATE MINERALS; TITANIUM DIOXIDE; TITANIUM OXIDES;

ANATASE (TIO2); DEPOSITED FILMS; HIGHLY CONDUCTING; MICROSCOPIC STRUCTURES; POLARIZED OPTICAL MICROSCOPE (POM); PULSED LASERS; SMALL GRAINS; STRUCTURAL STUDIES; TRANSMISSION ELECTRON MICROSCOPE (TEM); TRANSPARENT CONDUCTING FILMS;

CONDUCTIVE FILMS;

EID: 46449124437     PISSN: 07342101     EISSN: None     Source Type: Journal    
DOI: 10.1116/1.2944260     Document Type: Article

References (8)

1. D. S. Ginley and C. Bright, Mater. Res. Bull. 25, 15 (2000).
2. H. L. Hartnagel, A. L. Dawar, A. K. Jain, and C. Jagadish, Semiconducting Transparent Thin Films (Institute of Physics, Bristol, UK, 1995).
3. Y. Furubayashi, T. Hitosugi, Y. Yamamoto, K. Inaba, G. Kinoda, Y. Hirose, T. Shimada, and T. Hasegawa, Appl. Phys. Lett. 86, 252101 (2005).
4. T. Hitosugi, A. Ueda, S. Nakao, N. Yamada, Y. Furubayashi, Y. Hirose, T. Shimada, and T. Hasegawa, Appl. Phys. Lett. 90, 212106 (2007).
5. N. Yamada, T. Hitosugi, N. L. H. Hoang, Y. Furubayashi, Y. Hirose, T. Shimada, and T. Hasegawa, Jpn. J. Appl. Phys. 46, 5275 (2007).
6. O. Carp, C. L. Huisman, and A. Reller, Prog. Solid State Chem. 32, 33 (2004).
7. Y. Shigesato, D. C. Paine, and T. E. Haynes, J. Appl. Phys. 73, 3805 (1993).
8. H.-U. Habermeier, Mater. Today 10, 34 (2007).