Production of MF and DC-pulse sputtered anti-reflective/anti-static optical interference coatings using a large area in-line coater

Thin Solid Films

Volumn 502, Issue 1-2, 2006, Pages 175-180

  Sittinger, V ^a   Pflug, A ^a   Werner, W ^a   Rickers, C ^a   Vergohl M ^a   Kaiser, A ^a   Szyszka, B ^a  

^a FRAUNHOFER INSTITUTE FOR SURFACE ENGINEERING AND THIN FILMS IST   (Germany)

Author keywords

ARAS coatings; Multilayers; Optical coatings; Sputtering

Indexed keywords

GLASS; MULTILAYERS; SILICA; SPECTROPHOTOMETERS; SPUTTER DEPOSITION; TITANIUM DIOXIDE;

ARAS COATINGS; OPTICAL CONSTANTS; PRODUCTION-LIKE IN-LINE SPUTTER; VARIABLE ANGLE;

OPTICAL COATINGS;

EID: 33344461245     PISSN: 00406090     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.tsf.2005.07.270     Document Type: Conference Paper

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