HiPIMStechnoIogy and field of application;HiPIMS Technologic und Anwendungsfelder

Vakuum in Forschung und Praxis

Volumn 21, Issue 1, 2009, Pages 32-38

  Bandorf, Ralf ^a   Vergöhl, Michael ^a   Werner, Oliver ^a   Sittinger, Volker ^a   Bräuer, Günfer ^a  

^a FRAUNHOFER INSTITUTE FOR SURFACE ENGINEERING AND THIN FILMS IST   (Germany)

Author keywords

[No Author keywords available]

Indexed keywords

APPLIED RESEARCHES; HIGH DENSITIES; HIGH REFRACTIVE INDICES; HIGH-POWER; HIGH-POWER PULSE; INDUSTRIAL BRANCHES; NEW TECHNOLOGIES; PLANAR MAGNETRONS; POWER DENSITIES; PULSE PLASMAS; PULSED PLASMAS; SMOOTH SURFACES; SUPERIOR COATINGS; TARGET MATERIALS; THIN-FILM COATINGS;

DC GENERATORS; ELECTRON TUBES; MAGNETRONS; OPTICAL COATINGS; PLASMAS; REFRACTIVE INDEX;

CATHODES;

EID: 62449263726     PISSN: 0947076X     EISSN: None     Source Type: Journal    
DOI: 10.1002/vipr.200900377     Document Type: Article

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