Incorporating compliant elastomers for jumping locomotion in microrobots

Smart Materials and Structures

Volumn 22, Issue 1, 2013, Pages

  Gerratt, Aaron P ^a   Bergbreiter, Sarah ^a  

^a UNIVERSITY OF MARYLAND   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

ACTUATED MECHANISMS; ENERGY STORAGE SYSTEMS; HIGH ASPECT RATIO; JUMPING ROBOT; MICROFABRICATION PROCESS; MICROROBOTS; ON CHIPS; SMALL INSECTS;

ASPECT RATIO; ELECTROMECHANICAL DEVICES; MEMS; PLASTICS;

ELASTOMERS;

EID: 84871605147     PISSN: 09641726     EISSN: 1361665X     Source Type: Journal    
DOI: 10.1088/0964-1726/22/1/014010     Document Type: Article

References (53)

1. Full R J and Tu M S 1991 Mechanics of a rapid running insect: two-, four- and six-legged locomotion J. Exp. Biol. 156 215-31
2. Seidl T and Wehner R 2008 Walking on inclines: how do desert ants monitor slope and step length Front. Zool. 5 8 (Pubitemid 351999986)
3. Bennet-Clark H C and Lucey E C A 1967 The jump of the flea: a study of the energetics and a model of the mechanism J. Exp. Biol. 47 59-76
4. Burrows M 2003 Froghopper insects leap to new heights Nature 424 509 (Pubitemid 36975765)
5. Gerratt A P, Penskiy I and Bergbreiter S 2010 SOI/elastomer process for energy storage and rapid release J. Micromech. Microeng. 20 104011
6. Dario P, Valleggi R, Carrozza M C, Montesi M C and Cocco M 1992 Microactuators for microrobots: a critical survey J. Micromech. Microeng. 2 141-57 (Pubitemid 23639411)
7. Ebefors T, Mattsson J U, Kalvesten E and Stemme G 1999 A walking silicon microrobot Int. Conf. Solid-State Sensors, Actuators, and Microsystes (Transducers) (Sendai, June) pp 1202-5
8. Trimmer W S N 1989 Microrobots and micromechanical systems Sensors Actuators 19 267-87 (Pubitemid 20597852)
9. Donald B R, Levey C G, McGray C D, Paprotny I and Rus D 2006 An untethered, electrostatic, globally controllable MEMS microrobot J. Microelectromech. Syst. 15 1-15 (Pubitemid 43210786)
10. Yeh R, Kruglick E J J and Pister K S J 1996 Surface-micromachined components for articulated microrobots J. Microelectromech. Syst. 5 10-7 (Pubitemid 126582170)
11. Erdem E Y, Chen Y-M, Mohebbi M, Suh J W, Kovacs G T A, Darling R B and Bohringer K F 2010 Thermally actuated omnidirectional walking microrobot J. Microelectromech. Syst. 19 433-42
12. Petersen K E 1982 Silicon as a mechanical material Proc. IEEE 70 420-57
13. Bennet-Clark H C 1976 Energy storage in jumping insects The Insect Integument ed H R Hepburn (Amsterdam: Elsevier) pp 421-43
14. Kim S 2006 iSprawl: design and tuning for high-speed autonomous open-loop running Int. J. Robot. Res. 25 903-12 (Pubitemid 44267557)
15. Saranli U, Buehler M and Koditschek D E 2001 RHex: a simple and highly mobile hexapod robot Int. J. Robot. Res. 20 616-31 (Pubitemid 34566119)
16. Wood R J 2008 The first takeoff of a biologically inspired at-scale robotic insect IEEE Trans. Robot. 24 341-7 (Pubitemid 351586012)
17. Hollar S, Bergbreiter S and Pister K S J 2003 Bidirectional inchworm motors and two-DOF robot leg operation Int. Conf. Solid-State Sensors, Actuators, and Microsystes (Transducers) (Boston, MA, June) pp 262-7
18. Schneider F, Fellner T, Wilde J and Wallrabe U 2008 Mechanical properties of silicones for MEMS J. Micromech. Microeng. 18 065008
19. Xia Y and Whitesides G M 1998 Soft lithography Annu. Rev. Mater. Sci. 28 153-84 (Pubitemid 128631417)
20. Suzuki Y and Tai Y C 2006 Micromachined high-aspect-ratio parylene spring and its application to low-frequency accelerometers J. Microelectromech. Syst. 15 1364-70 (Pubitemid 44566954)
21. Churaman W A, Gerratt A P and Bergbreiter S 2011 First leaps toward jumping microrobots IEEE/RSJ Int. Conf. Intelligent Robots and Systems (San Francisco, CA, Sept.) pp 1680-6
22. Bergbreiter S 2008 Effective and efficient locomotion for millimeter-sized microrobots IEEE/RSJ Int. Conf. Intelligent Robots and Systems (Nice, Sept.) pp 4030-5
23. Fiorini P and Burdick J 2003 The development of hopping capabilities for small robots Autonom. Robot. 14 239-54
24. Nachtigall W 2001 Some aspects of Reynolds number effects in animals Math. Methods Appl. Sci. 24 1401-8 (Pubitemid 34124825)
25. Bergbreiter S 2007 Autonomous jumping microrobots PhD University of California, Berkeley, December
26. Bennet-Clark H C and Alder G M 1979 The effect of air resistance on the jumping performance of insects J. Exp. Biol. 82 105-21
27. Bell D J, Lu T J, Fleck N A and Spearing S M 2005 MEMS actuators and sensors: observations on their performance and selection for purpose J. Micromech. Microeng. 15 S153-64
28. Churaman W A, Currano L J, Morris C J, Rajkowski J E and Bergbreiter S 2012 The first launch of an autonomous thrust-driven microrobot using nanoporous energetic silicon J. Microelectromech. Syst. 21 198-205
29. Lindsay W, Teasdale D, Milanovic V, Pister K S J and Fernandez-Pello C 2001 Thrust and electrical power from solid propellant microrockets IEEE Int. Conf. Micro Electro Mechanical Systems (Interlaken, Jan.) pp 606-10 (Pubitemid 32470879)
30. Kovac M, Fuchs M, Guignard A, Zufferey J C and Floreano D 2008 A miniature 7g jumping robot IEEE Int. Conf. Robotics and Automation (Pasadena, CA, May) pp 373-8
31. Tsukagoshi H, Sasaki M, Kitagawa A and Tanaka T 2005 Design of a higher jumping rescue robot with the optimized pneumatic drive IEEE Int. Conf. on Robotics and Automation (Barcelona, April) pp 1276-83 (Pubitemid 46083967)
32. German J 2000 Hop to it: Sandia Hoppers Leapfrog Conventional Wisdom about Robot Mobility www.sandia.gov/media/NewsRel/NR2000/hoppers.htm
33. Stoeter S A and Papanikolopoulos N 2006 Kinematic motion model for jumping scout robots IEEE Trans. Robot. 22 397-402
34. Karpelson M, Wei G Y and Wood R J 2008 A review of actuation and power electronics options for flapping-wing robotic insects IEEE Int. Conf. Robotics and Automation (Pasadena, CA, May) pp 779-86
35. Balakrisnan B and Smela E 2010 Challenges in the microfabrication of dielectric elastomer actuators Proc. SPIE 7642 76420K
36. Brochu P and Pei Q 2010 Advances in dielectric elastomers for actuators and artificial muscles Macromol. Rapid Commun. 31 10-36
37. O'Halloran A, O'Malley F and McHugh P 2008 A review on dielectric elastomer actuators, technology, applications, and challenges J. Appl. Phys. 104 071101
38. Hoffman K and Wood R J 2011 Myriapod-like ambulation of a segmented microrobot Autonom. Robot. 31 103-14
39. Yeh R, Hollar S and Pister K S J 2002 Single mask, large force, and large displacement electrostatic linear inchworm motors J. Microelectromech. Syst. 11 330-6 (Pubitemid 34950040)
40. Maloney J M, Schreiber D S and DeVoe D L 2004 Large-force electrothermal linear micromotors J. Micromech. Microeng. 14 226-34
41. Penskiy I, Gerratt A P and Bergbreiter S 2011 Efficient electrostatic inchworm motors with simple control and high force density Int. Conf. Solid-State Sensors, Actuators, and Microsystes (Transducers) (Beijing, June)
42. Lee J N, Park C and Whitesides G M 2003 Solvent compatibility of poly(dimethylsiloxane)-sased microfluidic devices Anal. Chem. 75 6544-54 (Pubitemid 37493912)
43. Burdick J and Fiorini P 2003 Minimalist jumping robots for celestial exploration Int. J. Robot. Res. 22 653-74
44. Braunig P and Burrows M 2008 Neurons controlling jumping in froghopper insects J. Comp. Neurol. 507 1065-75 (Pubitemid 351214229)
45. Burrows M 2006 Morphology and action of the hind leg joints controlling jumping in froghopper insect J. Exp. Biol. 209 4622-37 (Pubitemid 46033358)
46. Okada Y and Tokumaru Y 1984 Precise determination of lattice parameter and thermal expansion coefficient of silicon between 300 and 1500 k J. Appl. Phys. 56 314-20 (Pubitemid 14626802)
47. Penskiy I, Gerratt A P and Bergbreiter S 2011 Friction, adhesion and wear properties of PDMS films on silicon sidewalls J. Micromech. Microeng. 21 105013
48. Erismis M A, Neves H P, Puers R and Van Hoof C 2008 A low-voltage large-displacement large-force inchworm actuator J. Microelectromech. Syst. 17 1294-301
49. Sarajlic E, Yamahata C, Berenschot E, Tas N, Fujita H and Krijnen G 2010 High-performance shuffle motor fabricated by vertical trench isolation technology Micromachines 1 48-67
50. de Boer M P, Luck D L, Ashurst W R, Maboudian R, Corwin A D, Walraven J A and Redmond J M 2004 High-performance surface-micromachined inchworm actuator J. Microelectromech. Syst. 13 63-74
51. Kovac M, Schlegel M, Zufferey J-C and Floreano D 2009 A miniature jumping robot with self-recovery capabilities IEEE/RSJ Int. Conf. on Intelligent Robots and Systems (St. Louis, MO, Oct.) pp 583-8
52. Noh M, Kim S-W, An S, Koh J-S and Cho K-J 2012 Flea-inspired catapult mechanism for miniature jumping robots IEEE Trans. Robot. 28 1007-18
53. Kovac M, Hraiz W, Fauria O, Zufferey J-C and Floreano D 2011 The EPFL jumpglider: a hybrid jumping and gliding robot with rigid or folding wings IEEE Int. Conf. Robotics and Biomimetics (Phuket, Dec.) pp 1503-8