Challenges in the microfabrication of dielectric elastomer actuators

Proceedings of SPIE - The International Society for Optical Engineering

Volumn 7642, Issue , 2010, Pages

  Balakrisnan, Bavani ^a   Smela, Elisabeth ^a  

^a UNIVERSITY OF MARYLAND   (United States)

Author keywords

DEA; MEMS; Microfabrication; Review; Surface micromachining

Indexed keywords

COMPLIANT ELECTRODES; DEA; DIELECTRIC ELASTOMER ACTUATORS; DRIVER CIRCUIT; DRIVING VOLTAGES; FABRICATION METHOD; FABRICATION PROCEDURE; MACRO SCALE; MICRO PUMP; MICRO-SCALES; MICROELECTROMECHANICAL SYSTEMS; MICROFABRICATED; MICROOPTICAL SYSTEMS; MICROROBOTS; RESEARCH NEEDS; SACRIFICIAL LAYER; SMALL DEVICES;

ACTUATORS; CONDUCTING POLYMERS; FILMS; MACROS; MICROANALYSIS; MICROELECTROMECHANICAL DEVICES; MICROFABRICATION; OPTICAL SYSTEMS; PLASTICS; PUMPS; RUBBER; SURFACE MICROMACHINING;

COMPOSITE MICROMECHANICS;

EID: 77953247065     PISSN: 0277786X     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.1117/12.847613     Document Type: Conference Paper

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