A low-voltage large-displacement large-force inchworm actuator

Journal of Microelectromechanical Systems

Volumn 17, Issue 6, 2008, Pages 1294-1301

  Erismis, Mehmet A ^a,b   Neves, Herc P ^a   Puers, Robert ^b   Van Hoof, Chris ^a,b  

^a IMEC   (Belgium)

^b UNIVERSITY OF LEUVEN   (Belgium)

Author keywords

Friction; Inchworm motor; Low voltage actuator; Pull in actuator; Stepper motor

Indexed keywords

APPLICATIONS; MICROACTUATORS; MOTORS; SILICON; THICKNESS MEASUREMENT;

ANGULAR DEFLECTIONS; BEAM BENDING; BIOMEDICAL APPLICATIONS; IN-VIVO; INCH-WORMS; INCHWORM ACTUATORS; INCHWORM MOTOR; INPUT VOLTAGES; LONG RANGES; LOW VOLTAGES; LOW-VOLTAGE ACTUATOR; MICROPOSITIONING; MULTIUSER MEMS PROCESSES; OPERATING VOLTAGES; OUTPUT FORCES; PERFORMANCE DETERIORATIONS; PULL-IN ACTUATOR; SILICON ON INSULATORS; STEP SIZES; STEPPER MOTOR;

ACTUATORS;

EID: 57449094406     PISSN: 10577157     EISSN: None     Source Type: Journal    
DOI: 10.1109/JMEMS.2008.2004852     Document Type: Article

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