Micromachined high-aspect-ratio parylene spring and its application to low-frequency accelerometers

Journal of Microelectromechanical Systems

Volumn 15, Issue 5, 2006, Pages 1364-1370

  Suzuki, Yuji ^a   Tai, Yu Chong ^b  

^a UNIVERSITY OF TOKYO   (Japan)

^b California Institute of Technology   (United States)

Author keywords

Capacitive accelerometer; High aspect ratio beam; Low spring constant; Parylene

Indexed keywords

CAPACITIVE ACCELEROMETER; PARYLENE SPRING; YIELD STRAIN;

ACCELEROMETERS; ASPECT RATIO; ELASTIC MODULI; MICROMACHINING; NATURAL FREQUENCIES; OSCILLATIONS;

SPRINGS (COMPONENTS);

EID: 33750007956     PISSN: 10577157     EISSN: None     Source Type: Journal    
DOI: 10.1109/JMEMS.2006.879706     Document Type: Article

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