Mechanical properties of silicones for MEMS

Journal of Micromechanics and Microengineering

Volumn 18, Issue 6, 2008, Pages

  Schneider, F ^a   Fellner, T ^a   Wilde, J ^a   Wallrabe, U ^a  

^a UNIVERSITY OF FREIBURG   (Germany)

Author keywords

[No Author keywords available]

Indexed keywords

COMPOSITE MICROMECHANICS; ELASTIC CONSTANTS; ELASTIC MODULI; ELECTROMECHANICAL DEVICES; HARDENING; MEMS; MICROELECTROMECHANICAL DEVICES; SILICONES; STRAIN; STRAIN RATE; THERMAL AGING;

APPLICATIONS.; DOW CORNING; MICRO-ELECTRO-MECHANICAL SYSTEMS;

MECHANICAL PROPERTIES;

EID: 57249087613     PISSN: 09601317     EISSN: 13616439     Source Type: Journal    
DOI: 10.1088/0960-1317/18/6/065008     Document Type: Conference Paper

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