High-performance surface-micromachined inchworm actuator

Journal of Microelectromechanical Systems

Volumn 13, Issue 1, 2004, Pages 63-74

  De Boer, Maarten P ^a   Luck, David L ^a,b   Ashurst, William R ^a,c   Maboudian, Roya ^a,c   Corwin, Alex D ^a   Walraven, Jeremy A ^a   Redmond, James M ^a  

^a SANDIA NATIONAL LABORATORIES   (United States)

^b UCB 450   (United States)

^c UNIVERSITY OF CALIFORNIA   (United States)

Author keywords

Force characterization; Friction; Interfacial contact mechanics; Linear actuation; MEMS stepping actuator; Michelson interferometry

Indexed keywords

ACTUATORS; COATINGS; FRICTION; INTERFEROMETRY; MICROMACHINING; OPTICAL MICROSCOPY; POLYCRYSTALLINE MATERIALS; SURFACES;

MICHELSON INTERFEROMETRY; MICROMACHINED INCHWORM ACTUATOR; POLYCRYSTALLINE SILICON; VOLTAGE CONTROLLED CLAMPS;

MICROELECTROMECHANICAL DEVICES;

EID: 1542604486     PISSN: 10577157     EISSN: None     Source Type: Journal    
DOI: 10.1109/JMEMS.2003.823236     Document Type: Article

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