Thermally actuated omnidirectional walking microrobot

Journal of Microelectromechanical Systems

Volumn 19, Issue 3, 2010, Pages 433-442

  Erdem, E Yegân ^a,b   Chen, Yu Ming ^a,c   Mohebbi, Matthew ^a,d   Suh, John W ^e,f   Kovacs, Gregory T A ^e   Darling, Robert B ^a   Böhringer, Karl F ^a  

^a UNIVERSITY OF WASHINGTON   (United States)

^b UNIVERSITY OF CALIFORNIA   (United States)

^c Quanta Computer   (Taiwan)

^d GOOGLE INC   (United States)

^e Stanford University   (United States)

^f GENERAL MOTORS CORPORATION   (United States)

Author keywords

Actuator array; Bimorph; Cilia; Microelectromechanical systems (MEMS); Microrobot; Thermal actuators

Indexed keywords

ACTUATOR ARRAYS; AT-SPEED; CONTROL MECHANISM; MICRO ROBOTS; MICROELECTROMECHANICAL SYSTEMS; PLANAR MOTION; ROTARY MOTIONS; STEP SIZE; SYSTEM ARCHITECTURES; THERMAL ACTUATOR; THERMAL BIMORPH ACTUATORS; THREE DEGREES OF FREEDOM;

ACTUATORS; DATA COMMUNICATION EQUIPMENT; MECHATRONICS; MEMS; MICROELECTROMECHANICAL DEVICES; ROBOTS; SURFACE MICROMACHINING;

COMPOSITE MICROMECHANICS;

EID: 77953122843     PISSN: 10577157     EISSN: None     Source Type: Journal    
DOI: 10.1109/JMEMS.2010.2041897     Document Type: Article

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