SOI/elastomer process for energy storage and rapid release

Journal of Micromechanics and Microengineering

Volumn 20, Issue 10, 2010, Pages

  Gerratt, Aaron P ^a   Penskiy, Ivan ^a   Bergbreiter, Sarah ^a  

^a UNIVERSITY OF MARYLAND   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

ADHESIVE PROPERTIES; DEEP REACTIVE ION ETCHING; FABRICATION PROCESS; HIGH ASPECT RATIO; IN-PLANE; MICRO-MECHANICAL; NONLINEAR STRAIN; RAPID RELEASE; SILICON ON INSULATOR WAFERS; SOFT ELASTOMERS; THREE-MASK PROCESS; YOUNG'S MODULUS;

ASPECT RATIO; ELASTOMERS; PLASTICS; SEMICONDUCTING SILICON COMPOUNDS; SILICON WAFERS; STRAIN;

REACTIVE ION ETCHING;

EID: 78049422588     PISSN: 09601317     EISSN: 13616439     Source Type: Journal    
DOI: 10.1088/0960-1317/20/10/104011     Document Type: Article

References (25)

1. Peterson K E 1982 Silicon as a mechanical material Proc. IEEE 70 420-57
2. Roylance L M and Angell J B 1979 A batch-fabricated silicon accelerometer IEEE Trans. Electron Devices 26 1911-7
3. Aden J S, Bohórquez J H, Collins D M, Crook M D, Garcia A and Hess U E 1994 The third-generation HP thermal inkjet printhead Hewlett-Packard J. 45 41-5
4. Van Kessel P F, Hornbeck L J, Meier R F and Douglass M R 1998 A MEMS-based projection display Proc. IEEE 86 1687-704
5. Bergbreiter S, Mahajan D and Pister K S J 2009 A reusable micromechanical energy storage/quick release system with assembled elastomers J. Micromech. Microeng. 19 055009
6. Ebefors T, Mattsson J U, Kalvesten E and Stemme G 1999 A walking silicon microrobot Proc. Transducers 1999 (Sendai, Japan) pp 1202-5
7. Kim S H, Engel J, Liu C and Jones D L 2005 Texture classification using a polymer-based MEMS tactile sensor J. Micromech. Microeng. 15 912-20
8. Suzuki Y and Tai Y C 2006 Micromachined high-aspect-ratio parylene spring and its application to low-frequency accelerometers J. Microelectromech. Syst. 15 1364-70
9. Nguyen N-T, Ho S-S and Low C 2004 A polymeric microgripper with integrated thermal actuators J. Micromech. Microeng. 14 969-74
10. Hopcroft M A, Nix W D and Kenny T W 2010 What is the Young's modulus of silicon? J. Microelectromech. Syst. 19 229-38
11. Williams J D and Wang W 2004 Study on the postbaking process and the effects on UV lithography of high aspect ratio SU-8 microstructures J. Microlithogr. Microfabrication Microsyst. 3 563-8
12. Yang X, Grosjean C and Tai Y-C 1999 Design, fabrication, and testing of micromachined silicone rubber membrane valves J. Microelectromech. Syst. 8 393-402
13. Duffy D C, McDonald J C, Schueller O J A and Whitesides G M 1998 Rapid prototyping of microfluidic systems in poly(dimethylsiloxane) Anal. Chem. 70 4974-84
14. Lotters J C, Olthuis W, Veltink P H and Bergveld P 1997 Design, realization and characterization of a symmetrical triaxial capacitive accelerometer for medical applications Sensors Actuators A 61 303-8
15. Tung Y-C and Kurabayashi K 2005 A single-layer PDMS-on-silicon hybrid microactuator with multi-axis out-of-plane motion capabilities: Part II. Fabrication and characterization J. Microelectromech. Syst. 14 558-66
16. Currano L J and Churaman W A 2009 Energetic nanoporous silicon devices J. Microelectromech. Syst. 18 799-807
17. Rodgers M S, Allen J J, Meeks K D, Jensen B D and Miller S L 1999 A micromechanical high-density energy storage/rapid release system Proc. SPIE 3876 212-22
18. SOIMUMPS 2008 http://www.memscap.com/
19. Lee J N, Park C and Whitesides G M 2003 Solvent compatibility of poly(dimethylsiloxane)-based microfluidic devices Anal. Chem. 75 6544-54
20. Information about Dow Corning brand silicone encapsulants 2010 http://www2.dowcorning.com/DataFiles/090007c88020bcca.pdf
21. Shigley J E, Mischke C R and Budynas R G 2004 Mechanical Engineering Design 7th edn (New York: McGraw Hill)
22. Schneider F, Fellner T, Wilde J and Wallrabe U 2008 Mechanical properties of silicones for MEMS J. Micromech. Microeng. 18 065008
23. Khanna Y P, Turi E A, Pedley T J, Vickroy V V and Abbott R F 1985 Dynamic mechanical relaxations in polyethylene Macromolecules 18 1302-9
24. Bergbreiter S and Pister K S J 2007 Design of an autonomous jumping microrobot Proc. IEEE Int. Conf. on Robotics and Automation (Roma, Italy) pp 447-53
25. Yeh R, Hollar S and Pister K S J 2002 Single mask, large force, and large displacement electrostatic linear inchworm motors J. Microelectromech. Syst. 11 330-6