Friction, adhesion and wear properties of PDMS films on silicon sidewalls

Journal of Micromechanics and Microengineering

Volumn 21, Issue 10, 2011, Pages

  Penskiy, I ^a   Gerratt, A P ^a   Bergbreiter, S ^a  

^a UNIVERSITY OF MARYLAND   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

ADHESION PROPERTIES; CONTACT MODELS; ELECTRICAL MEASUREMENT; FRICTION FORCE; FRICTION TEST; HIGH RESISTANCE; NORMAL PRESSURE; POLYDIMETHYLSILOXANE PDMS; SILICON-ON-INSULATOR STRUCTURE; SIMPLE METHOD; STATIC COEFFICIENT OF FRICTIONS; TEST DEVICE; WEAR PROPERTIES; WEAR TEST;

ADHESION; FRICTION; MICROCHANNELS; WEAR OF MATERIALS; WEAR RESISTANCE;

TRIBOLOGY;

EID: 80053609556     PISSN: 09601317     EISSN: 13616439     Source Type: Journal    
DOI: 10.1088/0960-1317/21/10/105013     Document Type: Article

References (42)

1. Gerratt A P, Penskiy I and Bergbreiter S 2010 SOI/elastomer process for energy storage and rapid release J. Micromech. Microeng. 20 104011
2. Bergbreiter S 2007 Autonomous jumping microrobots PhD Thesis University of California, Berkeley, CA
3. Moon M-W, Cha T-G, Lee K-R, Vaziri A and Kim H-Y 2010 Tilted janus polymer pillars Soft Matter 6 3924
4. Autumn K, Liang Y A, Hsieh S T, Zesch W, Chan W P, Kenny T W, Fearing R and Full R J 2000 Adhesive force of a single gecko foot-hair Nature 405 681-5 (Pubitemid 30428653)
5. Ding Z and Ziaie B 2009 Vibration-induced frequency-controllable bidirectional locomotion for assembly and microrobotic applications IEEE Trans. Robot. 25 1192-6
6. Linderman R J and Bright V M 2001 Nanometer precision positioning robots utilizing optimized scratch drive actuators Sensors Actuators A 91 292-300
7. Guo Z, Meng Y, Wu H, Su C and Wen S 2007 Measurement of static and dynamic friction coefficients of sidewalls of bulk-microfabricated MEMS devices with an on-chip micro-tribotester Sensors Actuators A 135 863-9 (Pubitemid 46518114)
8. Hwang I H, Lee Y G and Lee J H 2006 A micromachined friction meter for silicon sidewalls with consideration of contact surface shape J. Micromech. Microeng. 16 2475
9. Grade J D, Yasumura K Y and Jerman H 2005 Micromachined actuators with braking mechanisms Sensors Actuators A 122 1-8 (Pubitemid 41037280)
10. Wu J, Wang S and Miao J 2008 A MEMS device for studying the friction behavior of micromachined sidewall surfaces J. Microelectromech. Syst. 17 921-33
11. Subhash G, Corwin A D and de Boer M P 2004 Operational wear and friction in MEMS devices ASME Conf. Proc. pp 207-9 (Pubitemid 40929973)
12. Zhang S L, Tsou A H and Li J C M 2002 Scratching behavior of elastomeric poly(dimethylsiloxane) coatings J. Polym. Sci. B 40 1530-7 (Pubitemid 34745854)
13. Komvopoulos K 2003 Adhesion and friction forces in microelectromechanical systems: mechanisms, measurement, surface modification techniques, and adhesion theory J. Adhes. Sci. Technol. 17 477-517
14. Gatzen H H and Beck M 2003 Wear of single crystal silicon as a function of surface roughness Wear 254 907-10 (Pubitemid 36785182)
15. Williams J A and Le H R 2006 Tribology and MEMS J. Phys. D: Appl. Phys. 39 R201
16. Guo Z, Feng Z, Fan S, Zheng D and Zhuang H 2008 Research development of measuring methods on the tribology characters for movable MEMS devices: a review Microsyst. Technol. 15 343-54
17. Liu W, Zhou F, Yu L, Chen M, Li B and Zhao G 2002 Preparation and tribological investigation of thin silicone films J. Mater. Res. 17 2357-62 (Pubitemid 35236754)
18. Yeom J, Wu Y, Selby J C and Shannon M A 2005 Maximum achievable aspect ratio in deep reactive ion etching of silicon due to aspect ratio dependent transport and the microloading effect J. Vac. Sci. Technol. 23 2319-29 (Pubitemid 41788677)
19. Schneider F, Fellner T, Wilde J and Wallrabe U 2008 Mechanical properties of silicones for MEMS J. Micromech. Microeng. 18 065008
20. Legtenberg R, Groeneveld A W and Elwenspoek M 1996 Comb-drive actuators for large displacements J. Micromech. Microeng. 6 320-9 (Pubitemid 126607103)
21. Clark J V, Garmire D, Last M, Demmel J and Govindjee S 2004 Practical techniques for measuring MEMS properties Proc. Nanotechnology Conf. and Trade Show NSTI 04 vol 1 pp 402-5
22. Tang W C, Nguyen T-C H and Howe R T 1989 Laterally driven polysilicon resonant microstructures IEEE Micro Electro Mechanical Systems, Proc., An Investigation of Micro Structures, Sensors, Actuators, Machines and Robots pp 53-9
23. Ogata K 2010 Modern Control Engineering 5th edn (Boston, MA: Prentice-Hall)
24. Mukherjee T, Iyer S and Feeder G K 1998 Optimization-based synthesis of microresonators Sensors Actuators A 70 118-27 (Pubitemid 128399823)
25. Wortman J J and Evans R A 2009 Young's modulus, shear modulus, and Poisson's ratio in silicon and germanium J. Appl. Phys. 36 153-6
26. Bartenev G 1981 Friction and Wear of Polymers (New York: Elsevier Scientific)
27. Smith R 2008 Analyzing Friction in the Design of Rubber Products and their Paired Surfaces (Boca Raton, FL: CRC Press)
28. Tambe N S and Bhushan B 2005 Micro/nanotribological characterization of PDMS and PMMA used for BioMEMS/NEMS applications Ultramicroscopy 105 238-47 (Pubitemid 41539714)
29. Gupta R K 2002 Electronically probed measurements of MEMS geometries J. Microelectromech. Syst. 9 380-9
30. Osterberg P M and Senturia S D 2002 M-TEST: a test chip for MEMS material property measurement using electrostatically actuated test structures J. Microelectromech. Syst. 6 107-18 (Pubitemid 127607041)
31. Rocha L A, Mol L, Cretu E, Wolffenbuttel R F and Machado da Silva J 2008 A pull-in based test mechanism for device diagnostic and process characterization VLSI Des. 2008 1-8
32. Chen B and Miao J 2007 Influence of deep RIE tolerances on comb-drive actuator performance J. Phys. D: Appl. Phys. 40 970-6 (Pubitemid 46501516)
33. Timpe S J and Komvopoulos K 2006 The effect of adhesion on the static friction properties of sidewall contact interfaces of microelectromechanical devices J. Microelectromech. Syst. 15 1612-21 (Pubitemid 44921780)
34. Fuller K N G and Tabor D 1975 The effect of surface roughness on the adhesion of elastic solids Proc. R. Soc. Lond. A 345 327
35. Sinha S 2009 Polymer Tribology (London: Imperial College Press)
36. de Givenchy E P T, Amigoni S, Martin C, Andrada G, Caillier L, Geribaldi S and Guittard F 2009 Fabrication of superhydrophobic PDMS surfaces by combining acidic treatment and perfluorinated monolayers Langmuir 25 6448-53
37. Johnson K L, Kendall K and Roberts A D 1971 Surface energy and the contact of elastic solids Proc. R. Soc. Lond. A 324 301
38. Mata A, Fleischman A J and Roy S 2005 Characterization of polydimethylsiloxane (PDMS) properties for biomedical Micro/Nanosystems Biomed. Microdevices 7 281-93
39. Popov V 2010 Contact Mechanics and Friction Physical Principles and Applications (Berlin: Springer)
40. Schallamach A 1952 The load dependence of rubber friction Proc. Phys. Soc. B 65 657
41. Bowden F 2001 The Friction and Lubrication of Solids (New York: Oxford University Press)
42. Yeh R, Hollar S and Pister K S J 2002 Single mask, large force, and large displacement electrostatic linear inchworm motors J. Microelectromech. Syst. 11 330-6 (Pubitemid 34950040)