An untethered, electrostatic, globally controllable MEMS micro-robot

Journal of Microelectromechanical Systems

Volumn 15, Issue 1, 2006, Pages 1-15

  Donald, Bruce R ^a   Levey, Christopher G ^b   McGray, Craig G ^a   Paprotny, Igor ^a   Rus, Daniela ^c  

^a Dartmouth College   (United States)

^b DARTMOUTH COLLEGE   (United States)

^c Department of Electrical Engineering and Computer Science   (United States)

Author keywords

Actuator; Control; Electrostatic; Fabrication; Locomotion; MEMS; Micro robot; PolyMUMPS; Robotics; Scrath drive; Steering; Untethered

Indexed keywords

CONDUCTIVE MATERIALS; ELECTRODES; ELECTROSTATIC ACTUATORS; MICROELECTROMECHANICAL DEVICES; MICROMACHINING; MOTION CONTROL; POLYSILICON; ROBOTIC ARMS;

CANTILEVERED STEERING ARM; MICRO-ROBOT; SCRATH-DRIVE; UNTETHERED SCRATCH DRIVE ACTUATOR; VACUUM MICROPROBE;

ROBOTICS;

EID: 32244432061     PISSN: 10577157     EISSN: None     Source Type: Journal    
DOI: 10.1109/JMEMS.2005.863697     Document Type: Article

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