Single mask, large force, and large displacement electrostatic linear inchworm motors

Journal of Microelectromechanical Systems

Volumn 11, Issue 4, 2002, Pages 330-336

  Yeh, Richard ^a   Hollar, Seth ^a   Pister, Kristofer S J ^a  

^a UNIVERSITY OF CALIFORNIA   (United States)

Author keywords

Actuators; Electrostatics; Gap closing; Inchworm motors; Microrobots

Indexed keywords

ACTUATORS; ENERGY EFFICIENCY; MICROELECTROMECHANICAL DEVICES; MOTORS; SILICON WAFERS;

ELECTROSTATIC LINEAR INCHWORM MOTORS;

ELECTROSTATIC DEVICES;

EID: 0036686315     PISSN: 10577157     EISSN: None     Source Type: Journal    
DOI: 10.1109/JMEMS.2002.800937     Document Type: Article

References (12)

1. Surface-micromachined components for articulated microrobots
2. Microelectromechanical components for articulated microrobots
3. A linear stepping actuator in surface micromachining technology for low voltages and large displacements
4. A millinewton microloading device
5. Surface micromachined microengine
6. Applications for surface-micromachined polysilicon thermal actuators and arrays
7. A quantitative analysis of scratch drive actuator using buckling motion
8. Squeeze-film damping in solid-state accelerometers
9. Analysis of closed-loop control of parallel-plate electrostatic microgrippers
10. Design of low-power articulated microrobots
11. M-test: A test chip for MEMS material property measurement using electrostatically actuated test structures
12. Preliminary circuits for smart dust