Efficient electrostatic inchworm motors with simple control and high force density

2011 16th International Solid-State Sensors, Actuators and Microsystems Conference, TRANSDUCERS'11

Volumn , Issue , 2011, Pages 2438-2441

  Penskiy, Ivan ^a   Gerratt, Aaron P ^a   Bergbreiter, Sarah ^a  

^a UNIVERSITY OF MARYLAND   (United States)

Author keywords

Electrostatic; flexible arm; gap closing actuator; inchworm

Indexed keywords

ACTUATION CONTROL; BLOCKING FORCES; ELECTRICAL INPUTS; FLEXIBLE ARM; GAP CLOSING; HIGH FORCE DENSITY; INCHWORM; INCHWORM MOTORS; LONGITUDINAL MOVEMENTS; MOTOR EFFICIENCIES; OUTPUT POWER; TRANSVERSE MOVEMENT;

ACTUATORS; ELECTROSTATICS; FLEXIBLE MANIPULATORS; MAGNETIC ANISOTROPY; MICROSYSTEMS; ROBOTIC ARMS;

SOLID-STATE SENSORS;

EID: 80052132392     PISSN: None     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.1109/TRANSDUCERS.2011.5969660     Document Type: Conference Paper

References (11)

1. A.M. Flynn, L.S. Tavrow, S.F. Bart, R.A. Brooks, D.J. Ehrlich, K.R. Udayakumar, L.E. Cross, "Piezoelectric micromotors for microrobots", J. Microelectromech. Syst., Vol. 1, pp. 44-51, 1992.
2. N. B. Hubbard, M. L. Culpepper, L. L. Howell, "Actuators for micropositioners and nanopositioners," Appl. Mech. Rev., Vol. 59, No. 6, pp. 324-334, 2006.
3. M. Karpelson, G.-Y. Wei, R. J. Wood, "A review of actuation and power electronics options for flapping-wing robotic insects," in IEEE Int. Conf. on Robotics and Automation, 2008, pp. 779-786.
4. R. Yeh, S. Hollar, K. S. J. Pister, "Single mask, large force, and large displacement electrostatic linear inchworm motors", J. Microelectromech. Syst., Vol. 11, pp. 330-336, 2002.
5. S. Hollar, S. Bergbreiter, K. S. J. Pister, "Bidirectional inchworm motors and two-dof robot leg operation," in The 12th International Conference on Solid State Sensors, Actuators and Microsystems, Boston, MA, USA, June 2003, pp. 262-267.
6. J. M. Maloney, D. S. Schreiber, D. L. DeVoe, "Large-force electrothermal linear micromotors", J. Micromech. Microeng, Vol. 14, pp. 226-234, 2004.
7. M. A. Erismis, N. H Pereira, R. Puers, C. Van Hoof, "A low-voltage, large-displacement, large-force inchworm actuator", J. Microelectromech Syst., Vol. 17, pp. 1294-1301, 2008.
8. C. Arthur, N. Ellerington, T. Hubbard, M. Kujath, "MEMS earthworm: A thermally actuated peristaltic linear micromotor", J. Micromech. and Microeng., Vol. 21, 035022 (15pp), 2011.
9. E. Sarajlic, C. Yamahata, E. Berenschot, N. Tas, H. Fujita, G. Krijnen, "High-performance shuffle motor fabricated by vertical trench isolation technology", Micromachines, Vol. 1, pp. 48-67, 2010.
10. M. P. de Boer, D. L. Luck, W. R. Ashurst, R. Maboudian, A. D. Corwin, J. A. Walraven, J. M. Redmond, "High performance surface micromachined inchworm actuator", J. Microelectromech. Syst., Vol. 13, pp. 63-74, 2004.
11. N. R. Tas, T. Sonnenberg, R. Molenaar, M. Elwenspoek, "Design, fabrication and testing of laterally driven electrostatic motors employing walking motion and mechanical leverage", J. Micromech. and Microeng., Vol. 13, pp. N6-N15, 2003.