High-performance shuffle motor fabricated by vertical trench isolation technology

Micromachines

Volumn 1, Issue 2, 2010, Pages 48-67

  Sarajlic, Edin ^a   Yamahata, Christophe ^b   Berenschot, Erwin ^a   Tas, Niels ^a   Fujita, Hiroyuki ^b   Krijnen, Gijs ^a  

^a UNIVERSITY OF TWENTE   (Netherlands)

^b INSTITUTE OF INDUSTRIAL SCIENCE   (Japan)

Author keywords

Electrostatic micromotor; Inchworm motion; Shuffle motor; Stepper micromotor; Surface micromachining; Trench isolation

Indexed keywords

CYCLING FREQUENCIES; DRIVING VOLTAGES; EXPERIMENTAL CHARACTERIZATION; GROUNDED SURFACES; HIGH RESOLUTION; INCHWORM MOTION; LINEAR DEPENDENCE; MAXIMUM VELOCITY; NOVEL DESIGN; OPERATIONAL MODES; OUTPUT FORCE; PERFORMANCE CHARACTERISTICS; POWER DENSITIES; SHUFFLE MOTORS; STEP SIZE; TRAVEL RANGES; TRENCH ISOLATION;

STEPPING MOTORS; SURFACE MICROMACHINING;

MICROMOTORS;

EID: 79952648511     PISSN: None     EISSN: 2072666X     Source Type: Journal    
DOI: 10.3390/mi1020048     Document Type: Article

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