Thin-fi lm piezoelectric MEMS

MRS Bulletin

Volumn 37, Issue 11, 2012, Pages 1007-1017

  Eom, Chang Beom ^a   Trolier McKinstry, Susan ^b  

^a University of Wisconsin Madison   (United States)

^b PENNSYLVANIA STATE UNIVERSITY   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

ADAPTIVE RADIOS; ALN; CONTROL ELECTRONICS; DRIVE VOLTAGE; FAST RESPONSE; FRONT END; HETEROSTRUCTURE DESIGNS; HIGH INTEGRATION DENSITY; INTEGRATION DENSITY; LOW VOLTAGES; MEMS/NEMS; NANO ELECTROMECHANICAL SYSTEMS; PB(ZR , TI)O; PIEZOELECTRIC MEMS; THEORETICAL INVESTIGATIONS; ULTRASOUND MEDICAL IMAGING;

CRYSTALLOGRAPHY; ELECTROMECHANICAL DEVICES; LEAD; MEDICAL IMAGING; MEMS; TRANSDUCERS; ZIRCONIUM;

PIEZOELECTRICITY;

EID: 84869006329     PISSN: 08837694     EISSN: None     Source Type: Journal    
DOI: 10.1557/mrs.2012.273     Document Type: Article

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