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Volumn 14, Issue 34, 2002, Pages
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Nanostructured silicon for studying fundamental aspects of nanomechanics
a a a a a a a a a a a |
Author keywords
[No Author keywords available]
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Indexed keywords
COMPUTER SIMULATION;
DEGREES OF FREEDOM (MECHANICS);
RESONATORS;
SEMICONDUCTING SILICON;
SENSORS;
NANOMECHANICS;
NANOSTRUCTURED MATERIALS;
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EID: 0037009057
PISSN: 09538984
EISSN: None
Source Type: Journal
DOI: 10.1088/0953-8984/14/34/202 Document Type: Review |
Times cited : (50)
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References (93)
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