Design of MEMS PZT circular diaphragm actuators to generate large deflections

Journal of Microelectromechanical Systems

Volumn 15, Issue 4, 2006, Pages 832-839

  Hong, Eunki ^a   Trolier McKinstry, Susan ^a   Smith, Robert L ^b   Krishnaswamy, Silai V ^b   Freidhoff, Carl B ^b  

^a PENNSYLVANIA STATE UNIVERSITY   (United States)

^b NORTHROP GRUMMAN CORPORATION   (United States)

Author keywords

Diaphragm; Lead zirconate titanate (PZT); Microactuator; Microelectromechanical systems (MEMS); Piezoelectric unimorph

Indexed keywords

DIAPHRAGMS; ELECTRODES; FINITE ELEMENT METHOD; MICROACTUATORS; REACTIVE ION ETCHING; SILICA;

INTERDIGITATED ELECTRODES; LEAD ZIRCONATE TITANATE; PIEZOELECTRIC UNIMORPH;

MICROELECTROMECHANICAL DEVICES;

EID: 33747442777     PISSN: 10577157     EISSN: None     Source Type: Journal    
DOI: 10.1109/JMEMS.2006.879122     Document Type: Article

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