Designing piezoelectric films for micro electromechanical systems

IEEE Transactions on Ultrasonics, Ferroelectrics, and Frequency Control

Volumn 58, Issue 9, 2011, Pages 1782-1792

  Trolier Mckinstry, Susan ^a   Griggio, Flavio ^a   Yaeger, Charles ^a   Jousse, Pierre ^a   Zhao, Dalong ^a   Bharadwaja, Srowthi S N ^a   Jackson, Thomas N ^a   Jesse, Stephen ^b   Kalinin, Sergei V ^b   Wasa, Kiyotaka ^c  

^a PENNSYLVANIA STATE UNIVERSITY   (United States)

^b OAK RIDGE NATIONAL LABORATORY   (United States)

^c KYOTO UNIVERSITY   (Japan)

Author keywords

[No Author keywords available]

Indexed keywords

APPROPRIATE MATERIALS; COLLECTIVE MOTIONS; CONNECTIVITY PATTERN; ENERGY HARVESTING SYSTEMS; GRAIN SIZE; LOW-VOLTAGE; MICRO ELECTRO MECHANICAL SYSTEM; MODEL SYSTEM; NON-LINEAR RESPONSE; NON-LINEARITY; NONLINEAR MATRIX; PEROVSKITE FILMS; PIEZOELECTRIC COEFFICIENT; PIEZOELECTRIC FILM; PIEZOELECTRIC PROPERTY; PIEZOELECTRIC THIN FILMS; PIEZOELECTRICS; PIEZORESPONSE FORCE MICROSCOPY; RAYLEIGH BEHAVIOR; ULTRASOUND ARRAYS; WIRELESS SENSOR;

BEHAVIORAL RESEARCH; DIELECTRIC MATERIALS; DOMAIN WALLS; ENERGY HARVESTING; GRAIN SIZE AND SHAPE; PEROVSKITE; PIEZOELECTRICITY; THIN FILMS; ULTRASONICS; UNATTENDED SENSORS;

MATHEMATICAL MODELS;

EID: 80053039215     PISSN: 08853010     EISSN: None     Source Type: Journal    
DOI: 10.1109/TUFFC.2011.2015     Document Type: Conference Paper

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