Preparation of (001)-oriented Pb(Zr5Ti)O3 thin films and their piezoelectric applications

IEEE Transactions on Ultrasonics, Ferroelectrics, and Frequency Control

Volumn 54, Issue 12, 2007, Pages 2431-2437

  Fujii, Eiji ^a   Takayama, Ryoichi ^a   Nomura, Kouji ^a   Murata, Akiko ^a   Hirasawa, Taku ^a   Tomozawa, Atsushi ^a   Fujii, Satoru ^a   Kamada, Takeshi ^a   Torii, Hideo ^a  

^a PANASONIC CORPORATION   (Japan)

Author keywords

[No Author keywords available]

Indexed keywords

BUFFER LAYERS; EPITAXIAL GROWTH; MAGNESIA; MAGNETRON SPUTTERING; PIEZOELECTRIC ACTUATORS; SENSORS;

MORPHOTROPIC PHASE BOUNDARY; PIEZOELECTRIC PROPERTIES; POLING TREATMENT; PZT THIN FILMS;

THIN FILMS;

LEAD; LEAD TITANATE ZIRCONATE; TITANIUM; UNCLASSIFIED DRUG; ZIRCONIUM;

ARTICLE; ARTIFICIAL MEMBRANE; CHEMISTRY; ECHOGRAPHY; ELECTROCHEMISTRY; EQUIPMENT; EQUIPMENT DESIGN; EVALUATION; INSTRUMENTATION; MATERIALS TESTING; METHODOLOGY; REPRODUCIBILITY; SENSITIVITY AND SPECIFICITY; TRANSDUCER;

ELECTROCHEMISTRY; EQUIPMENT DESIGN; EQUIPMENT FAILURE ANALYSIS; LEAD; MATERIALS TESTING; MEMBRANES, ARTIFICIAL; REPRODUCIBILITY OF RESULTS; SENSITIVITY AND SPECIFICITY; TITANIUM; TRANSDUCERS; ULTRASONOGRAPHY; ZIRCONIUM;

EID: 40649103149     PISSN: 08853010     EISSN: None     Source Type: Journal    
DOI: 10.1109/TUFFC.2007.556     Document Type: Conference Paper

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