SCOPUS 정보 검색 플랫폼

Volumn 14, Issue 42, 2012, Pages 14611-14618

Gas phase low energy electron induced decomposition of the focused electron beam induced deposition (FEBID) precursor trimethyl (methylcyclopentadienyl) platinum(iv) (MeCpPtMe3)

(4) Engmann, Sarah a Stano, Michal b Matejčík, Štefan b Ingólfsson, Oddur a

a UNIVERSITY OF ICELAND (Iceland)

b Faculty of Natural Sciences (Slovakia)

Author keywords

[No Author keywords available]

Indexed keywords

PLATINUM COMPLEX;

ARTICLE; CHEMISTRY; ELECTRON; GAS; THERMODYNAMICS;

ELECTRONS; GASES; ORGANOPLATINUM COMPOUNDS; THERMODYNAMICS;

EID: 84867362623 PISSN: 14639076 EISSN: None Source Type: Journal
DOI: 10.1039/c2cp42637d Document Type: Article

Times cited : (54)

References (53)

1
- 55249089714
- W. F. van Dorp C. W. Hagen J. Appl. Phys. 2008 104 081301
- (2008) J. Appl. Phys. , vol.104 , pp. 081301
- Van Dorp, W.F.¹ Hagen, C.W.²

2
- 49749114396
- I. Utke P. Hoffmann J. Melngailis J. Vac. Sci. Technol., B 2008 26 1197
- (2008) J. Vac. Sci. Technol., B , vol.26 , pp. 1197
- Utke, I.¹ Hoffmann, P.² Melngailis, J.³

3
- 0032091433
- H. Hiroshima M. Komuro Nanotechnology 1998 9 108
- (1998) Nanotechnology , vol.9 , pp. 108
- Hiroshima, H.¹ Komuro, M.²

4
- 29044446431
- J. D. Fowlkes S. J. Randolph P. D. Rack J. Vac. Sci. Technol., B 2005 23 2825
- (2005) J. Vac. Sci. Technol., B , vol.23 , pp. 2825
- Fowlkes, J.D.¹ Randolph, S.J.² Rack, P.D.³

5
- 0345698548
- K. T. K. v. Platen J. Chlebek M. Weiss K. Reimer H. Oertel W. H. Brünger J. Vac. Sci. Technol., B 1993 11 2219
- (1993) J. Vac. Sci. Technol., B , vol.11 , pp. 2219
- Platen, K.T.K.V.¹ Chlebek, J.² Weiss, M.³ Reimer, K.⁴ Oertel, H.⁵ Brünger, W.H.⁶

6
- 57249104946
- A. Botman M. Hesselberth J. J. L. Mulders J. Vac. Sci. Technol., B 2008 26 2464
- (2008) J. Vac. Sci. Technol., B , vol.26 , pp. 2464
- Botman, A.¹ Hesselberth, M.² Mulders, J.J.L.³

7
- 33744530679
- S. Frabboni G. C. Gazzadi L. Felisari A. Spessot Appl. Phys. Lett. 2006 88 213116
- (2006) Appl. Phys. Lett. , vol.88 , pp. 213116
- Frabboni, S.¹ Gazzadi, G.C.² Felisari, L.³ Spessot, A.⁴

8
- 0036648348
- Y. Lau P. Chee J. Thong V. Ng J. Vac. Sci. Technol., A 2002 20 1295
- (2002) J. Vac. Sci. Technol., A , vol.20 , pp. 1295
- Lau, Y.¹ Chee, P.² Thong, J.³ Ng, V.⁴

9
- 78651229374
- J. D. Wnuk S. G. Rosenberg J. M. Gorham W. F. van Dorp C. W. Hagen D. H. Fairbrother Surf. Sci. 2011 605 257
- (2011) Surf. Sci. , vol.605 , pp. 257
- Wnuk, J.D.¹ Rosenberg, S.G.² Gorham, J.M.³ Van Dorp, W.F.⁴ Hagen, C.W.⁵ Fairbrother, D.H.⁶

10
- 79956056203
- I. Utke P. Hoffmann R. Berger L. Scandella Appl. Phys. Lett. 2002 80 4792
- (2002) Appl. Phys. Lett. , vol.80 , pp. 4792
- Utke, I.¹ Hoffmann, P.² Berger, R.³ Scandella, L.⁴

11
- 0001679513
- H. W. P. Koops R. Weiel D. P. Kern T. H. Baum J. Vac. Sci. Technol., B 1988 6 477
- (1988) J. Vac. Sci. Technol., B , vol.6 , pp. 477
- Koops, H.W.P.¹ Weiel, R.² Kern, D.P.³ Baum, T.H.⁴

12
- 37149053199
- A. Perentes G. Sinicco G. Boero B. Dwir P. Hoffmann J. Vac. Sci. Technol., B 2007 25 2228
- (2007) J. Vac. Sci. Technol., B , vol.25 , pp. 2228
- Perentes, A.¹ Sinicco, G.² Boero, G.³ Dwir, B.⁴ Hoffmann, P.⁵

13
- 47549086739
- T. Lukasczyk M. Schirmer H.-P. Steinrück H. Marbach Small 2008 4 841
- (2008) Small , vol.4 , pp. 841
- Lukasczyk, T.¹ Schirmer, M.² Steinrück, H.-P.³ Marbach, H.⁴

14
- 70349111136
- A. Botman J. J. L. Mulders C. W. Hagen Nanotechnology 2009 20 372001
- (2009) Nanotechnology , vol.20 , pp. 372001
- Botman, A.¹ Mulders, J.J.L.² Hagen, C.W.³

15
- 23144465269
- W. F. van Dorp B. van Someren C. W. Hagen P. Kruit P. A. Crozier Nano Lett. 2005 5 1303
- (2005) Nano Lett. , vol.5 , pp. 1303
- Van Dorp, W.F.¹ Van Someren, B.² Hagen, C.W.³ Kruit, P.⁴ Crozier, P.A.⁵

16
- 0036643634
- N. Silvis-Cividjian C. W. Hagen L. H. A. Leunissen P. Kruit Microelectron. Eng. 2002 61/62 693
- (2002) Microelectron. Eng. , vol.6162 , pp. 693
- Silvis-Cividjian, N.¹ Hagen, C.W.² Leunissen, L.H.A.³ Kruit, P.⁴

17
- 27744484845
- N. Silvis-Cividjian C. W. Hagen P. Kruit J. Appl. Phys. 2005 98 084905
- (2005) J. Appl. Phys. , vol.98 , pp. 084905
- Silvis-Cividjian, N.¹ Hagen, C.W.² Kruit, P.³

18
- 0002364960
- J. Schaefer J. Hoelzl Thin Solid Films 1972 13 81
- (1972) Thin Solid Films , vol.13 , pp. 81
- Schaefer, J.¹ Hoelzl, J.²

19
- 0015650448
- T. Koshikawa R. Shimizu J. Phys. D: Appl. Phys. 1973 6 1369
- (1973) J. Phys. D: Appl. Phys. , vol.6 , pp. 1369
- Koshikawa, T.¹ Shimizu, R.²

20
- 53449090617
- I. Bald J. Langer P. Tegeder O. Ingólfsson Int. J. Mass Spectrom. 2008 277 4
- (2008) Int. J. Mass Spectrom. , vol.277 , pp. 4
- Bald, I.¹ Langer, J.² Tegeder, P.³ Ingólfsson, O.⁴

21
- 0003394911
- Steinkopff/Springer, Darmstadt/New York
- E. Illenberger and J. Momigny, in Gaseous Molecular Ions. An Introduction to Elementary Processes Induced by Ionization, Steinkopff/Springer, Darmstadt/New York, 1992
- (1992) Gaseous Molecular Ions. An Introduction to Elementary Processes Induced by Ionization
- Illenberger, E.¹ Momigny, J.²

22
- 0038931972
- O. Ingólfsson F. Weik E. Illenberger Int. Rev. Phys. Chem. 1996 15 133
- (1996) Int. Rev. Phys. Chem. , vol.15 , pp. 133
- Ingólfsson, O.¹ Weik, F.² Illenberger, E.³

23
- 36149013874
- E. P. Wigner Phys. Rev. 1948 73 1002
- (1948) Phys. Rev. , vol.73 , pp. 1002
- Wigner, E.P.¹

24
- 80053138368
- S. Engmann M. Stano Š. Matejčík O. Ingólfsson Angew. Chem., Int. Ed. 2011 50 9475
- (2011) Angew. Chem., Int. Ed. , vol.50 , pp. 9475
- Engmann, S.¹ Stano, M.² Matejčík, Š.³ Ingólfsson, O.⁴

25
- 79958099188
- M. Allan J. Chem. Phys. 2011 134 204309
- (2011) J. Chem. Phys. , vol.134 , pp. 204309
- Allan, M.¹

26
- 84867345768
- O. May D. Kubala M. Allan Phys. Chem. Chem. Phys. 2012 14 2979
- (2012) Phys. Chem. Chem. Phys. , vol.14 , pp. 2979
- May, O.¹ Kubala, D.² Allan, M.³

27
- 84875378223
- Sterdyn, Poland
- M. Stano, S. Engmann, O. Ingólfsson and Š. Matejčík, Published in part at ECCL 2010, Sterdyn, Poland, 2010
- (2010) Published in Part at ECCL 2010
- Stano, M.¹ Engmann, S.² Ingólfsson, O.³ Matejčík, Š.⁴

28
- 70350106791
- W. F. van Dorp J. D. Wnuk J. M. Gorham D. H. Fairbrother T. E. Madey C. W. Hagen J. Appl. Phys. 2009 106 074903
- (2009) J. Appl. Phys. , vol.106 , pp. 074903
- Van Dorp, W.F.¹ Wnuk, J.D.² Gorham, J.M.³ Fairbrother, D.H.⁴ Madey, T.E.⁵ Hagen, C.W.⁶

29
- 65249130686
- J. D. Wnuk J. M. Gorham S. G. Rosenberg W. F. van Dorp T. E. Madey C. W. Hagen D. H. Fairbrother J. Phys. Chem. C 2009 113 2487
- (2009) J. Phys. Chem. C , vol.113 , pp. 2487
- Wnuk, J.D.¹ Gorham, J.M.² Rosenberg, S.G.³ Van Dorp, W.F.⁴ Madey, T.E.⁵ Hagen, C.W.⁶ Fairbrother, D.H.⁷

30
- 68349113696
- M. N. Hedhili J. H. Bredehöft P. Swiderek J. Phys. Chem. C 2009 113 13282
- (2009) J. Phys. Chem. C , vol.113 , pp. 13282
- Hedhili, M.N.¹ Bredehöft, J.H.² Swiderek, P.³

31
- 80052328279
- K. Landheer S. G. Rosenberg L. Bernau P. Swiderek I. Utke C. W. Hagen D. H. Fairbrother J. Phys. Chem. C 2011 115 17452
- (2011) J. Phys. Chem. C , vol.115 , pp. 17452
- Landheer, K.¹ Rosenberg, S.G.² Bernau, L.³ Swiderek, P.⁴ Utke, I.⁵ Hagen, C.W.⁶ Fairbrother, D.H.⁷

32
- 0037469365
- M. Stano Š. Matejčík J. D. Skalny T. D. Märk J. Phys. B: At., Mol. Opt. Phys. 2003 36 261
- (2003) J. Phys. B: At., Mol. Opt. Phys. , vol.36 , pp. 261
- Stano, M.¹ Matejčík, Š.² Skalny, J.D.³ Märk, T.D.⁴

33
- 33751392578
- Z. Xue H. Thridandam H. D. Kaesz R. F. Hicks Chem. Mater. 1992 4 162
- (1992) Chem. Mater. , vol.4 , pp. 162
- Xue, Z.¹ Thridandam, H.² Kaesz, H.D.³ Hicks, R.F.⁴

34
- 36849100616
- NIST
- A. Stamatovic G. J. Schulz Rev. Sci. Instrum. 1968 39 1752
- (1968) Rev. Sci. Instrum. , vol.39 , pp. 1752
- Stamatovic, A.¹ Schulz, G.J.²

35
- 0041493421
- K. W. Egger J. Organomet. Chem. 1970 24 501
- (1970) J. Organomet. Chem. , vol.24 , pp. 501
- Egger, K.W.¹

36
- 0008010681
- Physical Constants of Organic Compounds
- CRC Press/Taylor and Francis, Boca Raton, FL, 89 edn
- Physical Constants of Organic Compounds, in CRC Handbook of Chemistry and Physics, ed., D. R. Lide, CRC Press/Taylor and Francis, Boca Raton, FL, 89 edn, 2009
- (2009) CRC Handbook of Chemistry and Physics
- Lide, D.R.¹

37
- 33751558588
- P. Papp J. Urban Š. Matejčík M. Stano O. Ingólfsson J. Chem. Phys. 2006 125 204301
- (2006) J. Chem. Phys. , vol.125 , pp. 204301
- Papp, P.¹ Urban, J.² Matejčík, Š.³ Stano, M.⁴ Ingólfsson, O.⁵

38
- 0037162261
- S. Gohlke A. Rosa E. Illenberger F. Brüning M. A. Huels J. Chem. Phys. 2002 116 10164
- (2002) J. Chem. Phys. , vol.116 , pp. 10164
- Gohlke, S.¹ Rosa, A.² Illenberger, E.³ Brüning, F.⁴ Huels, M.A.⁵

39
- 35448958413
- A. Mauracher S. Denifl A. Aleem N. Wendt F. Zappa P. Cicman M. Probst T. D. Märk P. Scheier H. D. Flosadóttir O. Ingólfsson E. Illenberger Phys. Chem. Chem. Phys. 2007 9 5680
- (2007) Phys. Chem. Chem. Phys. , vol.9 , pp. 5680
- Mauracher, A.¹ Denifl, S.² Aleem, A.³ Wendt, N.⁴ Zappa, F.⁵ Cicman, P.⁶ Probst, M.⁷ Märk, T.D.⁸ Scheier, P.⁹ Flosadóttir, H.D.¹⁰ Ingólfsson, O.¹¹ Illenberger, E.¹²

40
- 34249998712
- I. Bald I. Dabkowska E. Illenberger O. Ingólfsson Phys. Chem. Chem. Phys. 2007 9 2983
- (2007) Phys. Chem. Chem. Phys. , vol.9 , pp. 2983
- Bald, I.¹ Dabkowska, I.² Illenberger, E.³ Ingólfsson, O.⁴

41
- 41049093971
- P. Sulzer F. Rondino S. Ptasinska E. Illenberger T. D. Märk P. Scheier Int. J. Mass Spectrom. 2008 272 149
- (2008) Int. J. Mass Spectrom. , vol.272 , pp. 149
- Sulzer, P.¹ Rondino, F.² Ptasinska, S.³ Illenberger, E.⁴ Märk, T.D.⁵ Scheier, P.⁶

42
- 84862700308
- B. Ómarsson E. H. Bjarnason O. Ingólfsson S. Haughey T. A. Field Chem. Phys. Lett. 2012 539-540 7
- (2012) Chem. Phys. Lett. , vol.539-540 , pp. 7
- Ómarsson, B.¹ Bjarnason, E.H.² Ingólfsson, O.³ Haughey, S.⁴ Field, T.A.⁵

43
- 84875376128
- Published in part at ECCL 2012, Stykkishólmur, Iceland
- B. Ómarsson, E. H. Bjarnason, S. A. Haughey, T. A. Field, A. Abramov, H. Jónsson and O. Ingólfsson, Published in part at ECCL 2012, Stykkishólmur, Iceland, 2012
- (2012)
- Ómarsson, B.¹ Bjarnason, E.H.² Haughey, S.A.³ Field, T.A.⁴ Abramov, A.⁵ Jónsson, H.⁶ Ingólfsson, O.⁷

44
- 0001266026
- D. S. Yang G. M. Bancroft R. J. Puddephatt K. H. Tan J. N. Cutler J. D. Bozek Inorg. Chem. 1990 29 4956
- (1990) Inorg. Chem. , vol.29 , pp. 4956
- Yang, D.S.¹ Bancroft, G.M.² Puddephatt, R.J.³ Tan, K.H.⁴ Cutler, J.N.⁵ Bozek, J.D.⁶

45
- 84864326404
- J. Shen K. Muthukumar H. O. Jeschke R. Valentí New J. Phys. 2012 14 073040
- (2012) New J. Phys. , vol.14 , pp. 073040
- Shen, J.¹ Muthukumar, K.² Jeschke, H.O.³ Valentí, R.⁴

46
- 0001997722
- O. Hackelberg A. Wojcicki Inorg. Chim. Acta 1980 44 L63
- (1980) Inorg. Chim. Acta , vol.44 , pp. 63
- Hackelberg, O.¹ Wojcicki, A.²

47
- 0040598175
- D. S. Yang G. M. Bancroft R. J. Puddephatt B. E. Bursten S. D. McKee Inorg. Chem. 1989 28 872
- (1989) Inorg. Chem. , vol.28 , pp. 872
- Yang, D.S.¹ Bancroft, G.M.² Puddephatt, R.J.³ Bursten, B.E.⁴ McKee, S.D.⁵

48
- 0001342947
- J. Thogersen L. D. Steele M. Scheer C. A. Brodie H. K. Haugen J. Phys. B: At., Mol. Opt. Phys. 1996 29 1323
- (1996) J. Phys. B: At., Mol. Opt. Phys. , vol.29 , pp. 1323
- Thogersen, J.¹ Steele, L.D.² Scheer, M.³ Brodie, C.A.⁴ Haugen, H.K.⁵

49
- 84867373595
- J. H. Richardson L. M. Stephenson J. I. Brauman J. Chem. Phys. 1973 59 5068
- (1973) J. Chem. Phys. , vol.59 , pp. 5068
- Richardson, J.H.¹ Stephenson, L.M.² Brauman, J.I.³

50
- 84984337460
- R. Basner M. Schmidt H. Deutsch Contrib. Plasma Phys. 1995 35 375
- (1995) Contrib. Plasma Phys. , vol.35 , pp. 375
- Basner, R.¹ Schmidt, M.² Deutsch, H.³

51
- 57249103622
- A. Botman D. A. M. de Winter J. J. L. Mulders J. Vac. Sci. Technol., B 2008 26 2460
- (2008) J. Vac. Sci. Technol., B , vol.26 , pp. 2460
- Botman, A.¹ De Winter, D.A.M.² Mulders, J.J.L.³

52
- 44149110141
- A. Botman M. Hesselberth J. J. L. Mulders Microelectron. Eng. 2008 85 1139
- (2008) Microelectron. Eng. , vol.85 , pp. 1139
- Botman, A.¹ Hesselberth, M.² Mulders, J.J.L.³

53
- 84867388263
- Zaragoza, Spain, and private communications
- S. G. Rosenberg and D. H. Fairbrother, Published in part at FEBIP 2012, Zaragoza, Spain, 2012, and private communications
- (2012) Published in Part at FEBIP 2012
- Rosenberg, S.G.¹ Fairbrother, D.H.²

* 이 정보는 Elsevier사의 SCOPUS DB에서 KISTI가 분석하여 추출한 것입니다.