Stiffness analysis of a compliant precision positioning stage

Robotica

Volumn 30, Issue 6, 2012, Pages 925-939

  Jia, X ^a,b   Liu, J ^b   Tian, Y ^a   Zhang, D ^a  

^a TIANJIN UNIVERSITY   (China)

^b HEBEI UNIVERSITY OF TECHNOLOGY   (China)

Author keywords

Compliant mechanism; Finite element analysis; Nanoimprint lithography; Stiffness matrix

Indexed keywords

3 DEGREE OF FREEDOM; CASTIGLIANO; DEVICE PERFORMANCE; DRIVING POINTS; FLEXURE HINGE; GEOMETRY PARAMETER; MATRIX TRANSFORMATION; POSITIONING STAGE; PRECISION POSITIONING STAGE; PSEUDO-RIGID BODY MODELS; STIFFNESS ANALYSIS; STIFFNESS FACTORS; SYSTEM STIFFNESS; VELOCITY MODEL;

COMPLIANT MECHANISMS; FINITE ELEMENT METHOD; HINGES; MECHANISMS; NANOIMPRINT LITHOGRAPHY; STIFFNESS;

STIFFNESS MATRIX;

EID: 84865753834     PISSN: 02635747     EISSN: 14698668     Source Type: Journal    
DOI: 10.1017/S0263574711001147     Document Type: Article

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